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■Features ・High-speed response and stable pressure control. ・Equipped with analog output and RS-232C communication as standard. ・High pressure accuracy of ± (0.25% FS).
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Dimensions (flow range 0.5SCCM)
Port size (flow range 0.5SCCM)
Pressure loss at F.S. flow rate
Part Number
PC/PC3/PCD/PCR series (pressure controller)Product
Mass flow controllerHandling Company
Japan Star Techno Co., Ltd.Categories
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