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Mass flow controller-Japan Star Techno Co., Ltd.

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Model Description

■Features ・High-speed response and stable pressure control. ・Equipped with analog output and RS-232C communication as standard. ・High pressure accuracy of ± (0.25% FS).


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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    PC/PC3/PCD/PCR series (pressure controller)

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Mass flow controller PC/PC3/PCD/PCR series (pressure controller)'s performance table

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Mass flow controller-Part Number-PC/PC3/PCD/PCR series (pressure controller) Available upon quote

There are 10 models for this product.

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