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Mass flow controller-Japan Star Techno Co., Ltd.

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Model Description

■Features -Uses MEMS sensors combined with standard control valves and PID algorithms. ・100ms control response. ・Equipped with analog output/input and RS-485 communication as standard. ・This series is an OEM product. Sold in lots.


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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    BASIS series (small low cost mass flow controller for OEM supply)

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Mass flow controller BASIS series (small low cost mass flow controller for OEM supply)'s performance table

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Mass flow controller-Part Number-BASIS series (small low cost mass flow controller for OEM supply) Available upon quote

There are 10 models for this product.

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