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■Features -Uses MEMS sensors combined with standard control valves and PID algorithms. ・100ms control response. ・Equipped with analog output/input and RS-485 communication as standard. ・This series is an OEM product. Sold in lots.
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Dimensions (flow range 0.5SCCM)
Port size (flow range 0.5SCCM)
Pressure loss at F.S. flow rate
Part Number
BASIS series (small low cost mass flow controller for OEM supply)Product
Mass flow controllerHandling Company
Japan Star Techno Co., Ltd.Categories
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Reviews shown here are reviews of companies.