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■Features ・Equipped with a control valve in the flow path and an external shutoff valve. - Compatible with applications that require greater airtightness. ・The MCVS series is compatible with corrosive gases.
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Dimensions (flow range 0.5SCCM)
Port size (flow range 0.5SCCM)
Pressure loss at F.S. flow rate
Part Number
MCV/MCVS series (equipped with shutoff valve)Product
Mass flow controllerHandling Company
Japan Star Techno Co., Ltd.Categories
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