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Mass flow controller-Japan Star Techno Co., Ltd.

MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment) | Mass flow controller
Japan Star Techno Co., Ltd.

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Model Description

■Features ・Built-in control valve in flow path. ・100ms control response with ±0.6% RD (16.7 to 100% FS) accuracy. - Compatible with 130 types of gases, including corrosive gases and refrigerant gases, in addition to the gases available with the standard type.

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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment)

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Mass flow controller MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment)'s performance table

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Mass flow controller-Part Number-MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment) Available upon quote

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Japan Star Techno Co., Ltd.

  • Japan

Category of this product

Flow Meters

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