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Mass flow controller-Japan Star Techno Co., Ltd.

MCQ/MCRQ series (high pressure type) | Mass flow controller
Japan Star Techno Co., Ltd.

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Model Description

■Features ・Maximum operating pressure is 320PSIA (2.2MPaA). ・Voltage resistance is 400PSIA (2.7MPaA). - Compatible with 98 types of gas like the standard type.

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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    MCQ/MCRQ series (high pressure type)

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Mass flow controller MCQ/MCRQ series (high pressure type)'s performance table

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Mass flow controller-Part Number-MCQ/MCRQ series (high pressure type) Available upon quote

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Japan Star Techno Co., Ltd.

  • Japan

Category of this product

Flow Meters

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