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Mass flow controller-Japan Star Techno Co., Ltd.

MCS/MCRS series (corrosive gas/refrigerant gas compatible) | Mass flow controller
Japan Star Techno Co., Ltd.

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Model Description

■Features - Compatible with 128 types of gases, including corrosive gases and refrigerant gases, in addition to the gases available with the standard type. -Material: 316L stainless steel, FFKM (Kalrez). ・Supports the same functions and options as the standard type.

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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    MCS/MCRS series (corrosive gas/refrigerant gas compatible)

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Mass flow controller MCS/MCRS series (corrosive gas/refrigerant gas compatible)'s performance table

Image Price (excluding tax) Dimensions (flow range 0.5SCCM) Port size (flow range 0.5SCCM) Pressure loss at F.S. flow rate
Mass flow controller-Part Number-MCS/MCRS series (corrosive gas/refrigerant gas compatible) Available upon quote H111.68mm x W84.79mm x D26.67mm M5 (10-32) female thread 6.89kPa (D)

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Japan Star Techno Co., Ltd.

  • Japan

Category of this product

Flow Meters

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