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Mass flow controller-Japan Star Techno Co., Ltd.

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Model Description

■Features - Compatible with 98 types of gases including mixed gases. ・100ms control response with ±0.6% RD (16.7 to 100% FS) accuracy. ・Batch control is also possible by adding the integration option.


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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

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  • Part Number

    MC/MCR series (standard type)

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Mass flow controller MC/MCR series (standard type)'s performance table

Image Price (excluding tax) Dimensions (flow range 0.5SCCM) Port size (flow range 0.5SCCM) Pressure loss at F.S. flow rate
Mass flow controller-Part Number-MC/MCR series (standard type) Available upon quote H98.98mm x W84.79mm x D26.67mm M5 (10-32) female thread 6.89kPa (D)

There are 10 models for this product.

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