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■Features - Compatible with 98 types of gases including mixed gases. ・100ms control response with ±0.6% RD (16.7 to 100% FS) accuracy. ・Batch control is also possible by adding the integration option.
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Dimensions (flow range 0.5SCCM)
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Pressure loss at F.S. flow rate
Part Number
MC/MCR series (standard type)Product
Mass flow controllerHandling Company
Japan Star Techno Co., Ltd.Categories
Image | Price (excluding tax) | Dimensions (flow range 0.5SCCM) | Port size (flow range 0.5SCCM) | Pressure loss at F.S. flow rate |
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Available upon quote | H98.98mm x W84.79mm x D26.67mm | M5 (10-32) female thread | 6.89kPa (D) |
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