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  1. Metoree
  2. Heat Sources
  3. Plate Heaters
  4. Film heating wafer hot chuck/PH101, 201, 301, 050 series
  5. PH201-C
Film heating wafer hot chuck/PH101, 201, 301, 050 series-MSA Factory Co., Ltd.

PH201-C | Film heating wafer hot chuck/PH101, 201, 301, 050 series
MSA Factory Co., Ltd.

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Compatible temperature controller

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  • Part Number

    PH201-C

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Film heating wafer hot chuck/PH101, 201, 301, 050 series PH201-C's performance table

Image Price (excluding tax) Compatible temperature controller Features Maximum temperature Plate material Plate size Power supply voltage Surface treatment
Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH201-C Available upon quote PCC100G, PCC107 Gold plating treatment, hot plate insulation treatment, Air cooling (using compressed air) function 200, 400℃ Aluminum alloy 70×70mm AC100V Gold plating treatment

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MSA Factory Co., Ltd.

  • Japan

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Plate Heaters

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