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  3. Plate Heaters
  4. Wafer/film heating film hot chuck/PA20-FC series
  5. PA2020-FC
Wafer/film heating film hot chuck/PA20-FC series-MSA Factory Co., Ltd.

PA2020-FC | Wafer/film heating film hot chuck/PA20-FC series
MSA Factory Co., Ltd.

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Compatible temperature controller

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  • Part Number

    PA2020-FC

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Wafer/film heating film hot chuck/PA20-FC series PA2020-FC's performance table

Image Price (excluding tax) Compatible temperature controller Features Maximum temperature Option Plate material Plate size Power supply voltage
Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2020-FC Available upon quote PCC100G, PCC107Co Porous ceramic adsorption hot chuck 200℃ Vacuum pump for adsorption, with fittings Porous ceramic (alumina), porous chuck □200mm AC100V

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MSA Factory Co., Ltd.

  • Japan

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Plate Heaters

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