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  2. Heat Sources
  3. Plate Heaters
  4. Wafer/film heating film hot chuck/PA20-FC series
  5. PA2012-FC
Wafer/film heating film hot chuck/PA20-FC series-MSA Factory Co., Ltd.

PA2012-FC | Wafer/film heating film hot chuck/PA20-FC series
MSA Factory Co., Ltd.

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Compatible temperature controller

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  • Part Number

    PA2012-FC

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Wafer/film heating film hot chuck/PA20-FC series PA2012-FC's performance table

Image Price (excluding tax) Compatible temperature controller Features Maximum temperature Option Plate material Plate size Power supply voltage
Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2012-FC Available upon quote PCC100G, PCC107Co Porous ceramic adsorption hot chuck 200℃ Vacuum pump for adsorption, with fittings Porous ceramic (alumina), porous chuck □120mm AC100V

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MSA Factory Co., Ltd.

  • Japan

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Plate Heaters

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