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■Product information ・English chemical formula: Carbon dioxide ・Molecular formula: CO2 ・CAS：124-38-9 ■Applications It can be used to support advanced immersion lithography, dedicated low temperature cleaning applications and DI (deionized water) processing. In industry, it is widely applied as a laser gas for laser cutting machines, and in scientific research, it is used in cell culture such as embryos, and supercritical extraction in pharmaceutical laboratories. Carbon dioxide laser pulses used in lithography processes in the semiconductor industry, and in oxidation, diffusion, chemical vapor deposition, ion etching processes, and wafer low temperature cleaning processes.
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Carbon dione (CO2)Product
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CHEMFISH TOKYO Co., Ltd.| Image | Price (excluding tax) | CAS | Category | English chemical formula | Molecular formula | Specification |
|---|---|---|---|---|---|---|
| Available upon quote | 124-38-9 | High purity gas | Carbon dioxide | CO2 | ≥99.99996% |
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