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CSOI Wafer-Icemos Technology Japan Co., Ltd.

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Buried oxide film Thermal oxide film Buried oxide film

Device Thickness Tolerance Range

Device layer Buried layer implant

Device layer Cavity creation location

Device layer Silicon growth method

Device layer cavity SPAN (width):thin film (device) thickness ratio

Device layer cavity depth

Device layer crystal orientation

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Device layer low efficiency

Device layer minimum bonding size characteristics

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Device layer thin film thickness/SOI thickness

Handle layer back side treatment

Handle layer crystal orientation

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Handle layer layer thickness range

Handle layer resistivity

Handle layer silicon growth method

Handle thickness

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  • Part Number

    CSOI Wafer Wafer diameter 100mm

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CSOI Wafer CSOI Wafer Wafer diameter 100mm's performance table

Image Price (excluding tax) Buried oxide film Thermal oxide film Buried oxide film Device Thickness Tolerance Range Device layer Buried layer implant Device layer Cavity creation location Device layer Silicon growth method Device layer cavity SPAN (width):thin film (device) thickness ratio Device layer cavity depth Device layer crystal orientation Device layer dopant type Device layer doping Device layer low efficiency Device layer minimum bonding size characteristics Device layer thickness Device layer thin film thickness/SOI thickness Handle layer back side treatment Handle layer crystal orientation Handle layer dopant type Handle layer doping Handle layer layer thickness range Handle layer resistivity Handle layer silicon growth method Handle thickness Handle thickness tolerance range
CSOI Wafer-Part Number-CSOI Wafer Wafer diameter 100mm Available upon quote 0.2-4.0μm by handle, device or both wafers ±0.5 μm N type or P type Handle, device or embedded layer CZ, MCZ or FZ <50:1 μm (by design) 1-30μm @ +/-10%, 31-300μm @+/-20% 100, 111 or 110 N or P N type: Phos, Red Phos, Sb&As P type: Boron ≤0.001 - ≥10,000 Ω-cm 20μm ≥1.5μm >2μm By lapping, etching or polishing 100, 111 or 110 N or P N type: Phos, Red Phos, Sb&As P type: Boron 280-1,150μm ≤0.001 - ≥10,000 Ω-cm CZ, MCZ or FZ 200-1,100μm ±5μm

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