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Response Rate
100.0%
Response Time
57.3hours
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Vacuum (source pressure)
Part Number
TYK2102-3Product
EFEM SorterHandling Company
PHT Co., Ltd.Categories
| Image | Price (excluding tax) | Career | Current consumption | EMO contact output | Interlock | Number of ports | Positive pressure (flow rate) | Positive pressure (source pressure) | Power supply voltage | Transport target | Vacuum (flow rate) | Vacuum (source pressure) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
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Available upon quote | 300mm FOUP 25 stages (SEMI E47.1) 300mm FOSB 25 stages (SEMI M31) | 4kVA (20A/200VAC) including FFU | 2 systems (dry contact) | 8 input points/8 output points (isolated I/O) | 3 ports | 30L/min | 0.6MPa~0.7MPa | Single phase AC200V±10% 50/60Hz±5% | 300mm wafer diameter: Φ300±0.2mm Thickness: 775μm | 50L/min | -80kPa~-90kPa |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
57.3hrs
