All Categories
History
Price (excluding tax)
You can search for other models from each index. The displayed value is the value of the currently selected part number.
Career
Current consumption
EMO contact output
Interlock
Number of ports
Positive pressure (flow rate)
Positive pressure (source pressure)
Power supply voltage
Transport target
Vacuum (flow rate)
Vacuum (source pressure)
Part Number
TYK2102-3Product
EFEM SorterHandling Company
PHT Co., Ltd.Categories
| Image | Price (excluding tax) | Career | Current consumption | EMO contact output | Interlock | Number of ports | Positive pressure (flow rate) | Positive pressure (source pressure) | Power supply voltage | Transport target | Vacuum (flow rate) | Vacuum (source pressure) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
Available upon quote | 300mm FOUP 25 stages (SEMI E47.1) 300mm FOSB 25 stages (SEMI M31) | 4kVA (20A/200VAC) including FFU | 2 systems (dry contact) | 8 input points/8 output points (isolated I/O) | 3 ports | 30L/min | 0.6MPa~0.7MPa | Single phase AC200V±10% 50/60Hz±5% | 300mm wafer diameter: Φ300±0.2mm Thickness: 775μm | 50L/min | -80kPa~-90kPa |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
