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This is a traditional shower method. The treatment tank body is made of polyvinyl chloride (PVC). Suitable for processing corrosive gases. ■Target equipment Wet etching, CVD, wet cleaning machines, epitaxial growth, exhaust of cylinder cabinets, etc. ■Target gases Cl2, HF, HCl, HNO3, NH4, exhaust gas treatment from CVD combustion abatement equipment, exhaust gas including organic and inorganic mist
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Maximum processing air volume
Processing tank
Type
Part Number
EX-007PVHandling Company
Toset Co., Ltd.Categories
Usage Scenarios
Electronics & Electrical UseImage | Price (excluding tax) | Maximum processing air volume | Processing tank | Type |
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Available upon quote | 7m3/min | 1 stage | Shower type |
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Reviews shown here are reviews of companies.