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  1. Metoree
  2. Purification Equipment
  3. Exhaust Gas Treatment Devices
  4. Wet type abatement equipment Shower/bubbling type scrubber EX series
  5. EX-007SUA
Wet type abatement equipment Shower/bubbling type scrubber EX series-Toset Co., Ltd.

EX-007SUA | Wet type abatement equipment Shower/bubbling type scrubber EX series
Toset Co., Ltd.

💻 Electronics & Electrical Use

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Model Description

This is a traditional shower method. The processing tank body is made of stainless steel. Suitable when there is an inflow of explosive gas such as silane gas. If corrosive gas such as chlorine gas is included, ETFE coating is applied inside the main body. ■Target device Exhaust for wet etching, CVD, wet cleaning machines, epitaxial growth, cylinder cabinets, etc. ■Target gas Cl2, HF, HCl, HNO3, NH4, exhaust gas treatment of CVD combustion abatement equipment, exhaust gas including organic and inorganic mist

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Maximum processing air volume

Processing tank

Type

See all 4 models in list

  • Part Number

    EX-007SUA

  • Usage Scenarios

    Electronics & Electrical Use

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Wet type abatement equipment Shower/bubbling type scrubber EX series EX-007SUA's performance table

Image Price (excluding tax) Maximum processing air volume Processing tank Type
Wet type abatement equipment Shower/bubbling type scrubber EX series-Part Number-EX-007SUA Available upon quote 7m3/min 1st stage Shower type

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Toset Co., Ltd.

  • Japan

Category of this product

Exhaust Gas Treatment Devices

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