Equipped with unique spatta cats
Japan Create Co., Ltd.
About This Product
■ Characteristics
・ Equipped with our own spatta cathode
・ Equipped with a 4 -axis mechanism (up and down, turned, rotation, tilt) in the work stage, achieving a high coverage in a three -dimensional film.
・ Equipped with up to three spatta cats, a laminated film such as a metal film, oxide film, etc. is possible.
■ Use
・ MEMS
・ Electronic components
・ Optical parts
・ In -vehicle parts
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Product
Equipped with unique spatta cats
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Handling Company
Japan Create Co., Ltd.
1 Models of Equipped with unique spatta cats
| Product Image | Part Number | Price (excluding tax) | Control operation | Data logging | Pressure control | Process gas | Spatta power supply | Sputta Cathode | Vacuum exhaust | Work mounting | Work size | Workstage | option |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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Three -dimensional sputtering device |
Available upon quote |
Control: PLC Operation: Touch panel or PC |
External memory or PC | APC control | AR, O2, N2, etc. | RF or DC | Magnetron method, target shutter | TMP+RP | Upper lid hiring rotation opening and closing type | Up to φ5 inch x 40mm high. Please contact us as it differs depending on the shape, size, material, etc. |
Heat temperature: 500 ° C (stage surface) Rotation: 30rpm Open Rid: 10RPM Railway: 40mmst Tilt mechanism: ± 30 ° Baseboard bias (RF or DC) |
Cooling (low-temperature film), moving magnet, cathode for magnetic material targets, dried pumps, light emitting analysis systems, Q-MASS, etc. |
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About Company Handling This Product
- Japan
- Since 1963
- 40 employees