Multi -unit sputtering device equipped with a unique spatta cats
Japan Create Co., Ltd.
About This Product
■ Characteristics
・ Equipped with our own spatta cathode
・ Equipped with a 3 -axis mechanism (up and down, rotation, rotation) on the board stage to achieve uniform film thickness distribution.
・ Equipped with our own rapid rising temperature drop board heating mechanism to achieve the board temperature of 900 ° C.
・ Equipped with up to 4 spatta cats, a laminated film such as a metal film, oxide film, etc. is possible.
・ Compatible with tray transportation
・ Combination of CVD rooms, vapor rooms, plasma blacking rooms, etc. is also available
■ Use
·semiconductor
・ MEMS
・ Electronic components
・ Optical parts
・ In -vehicle parts
-
Product
Multi -unit sputtering device equipped with a unique spatta cats
-
Handling Company
Japan Create Co., Ltd.
1 Models of Multi -unit sputtering device equipped with a unique spatta cats
| Product Image | Part Number | Price (excluding tax) | Board size | Board stage | Control operation | Data logging | Pressure control | Process gas | Spatta power supply | Sputta Cathode | Transportation of the board | Vacuum exhaust | option |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
Multi -unit sputtering device |
Available upon quote | Maximum φ12 inch |
Bachelon heating: 700 ° C (substrate surface) Rotation: 30rpm Open Rid: 10RPM Railway: 50mmst |
Control: PLC Operation: Touch panel or PC |
External memory or PC | APC control | AR, O2, N2, etc. | RF or DC | Magnetron method, target shutter | Vacuum transport robot |
Configuration 1: TMP+DP Configuration 2: CP+DP |
Bachelon heating 900 ° C, board bias (RF or DC), substrate cooling (low-temperature film), moving magnet, magnetic material target cathode, light emitting analysis system, tray transport, Q-MASS ETC |
Customers who viewed this product also viewed
Other products of Japan Create Co., Ltd.
View more products of Japan Create Co., Ltd.
About Company Handling This Product
- Japan
- Since 1963
- 40 employees