Multi -chamber -type sputtering device S800
Panasonic Production Engineering Co., Ltd.
About This Product
■ Features
・ Multi -chamber type and support a wide variety of processes
・ The unit of our S600 device can be installed
・ Maintenance of long -term hyperchd and uniformity by adjusting T/S distance
・ Improve spatta thin film characteristics with proprietary plasma control (MP spatta) technology
・ High temperature process is possible with a heater stage (800 ° C)
・ It can be used for various applications from development process to mass production process
■ A variety of units can be mounted
・ Realizes high productivity in the double load lock room
・ Compatible with φ4 to 8 inch substrates (supported by tray transport to variant substrates such as small shapes and rectangles)
・ Various units can be mounted on each process module ・ DC/RF cathode ・ MP spatta (proprietary technology) ・ AR cleaning ・ Reverse spatta ・ Baseboard, substrate heating ・ substrate heating ・ Chimney cooling
■ Sputta Cathode
・ A large -diameter wide erotic due to biased spinning magnet achieves a high -precision film thickness and long life of the target.
・ The magnetic field design is designed by us by our company to maximize customer requests.
■ T/S adjustment mechanism
Maintain high uniformity of film thickness to the target life by automatically adjusting the T/S distance change due to target erosion.
■ MP Spatta
・ With unique plasma control technology, the DC magnetron patta method (1) high energy of spatta particles (2) high -density of active species (3) Realize migration promotion of particles on the substrate.
・ Film film such as high crystals/high -direction -oriented functions, high -density/high moisture -resistant protection film, low -resistance metal film, etc., which are essential for miniaturization and high performance of electronic components
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Product
Multi -chamber -type sputtering device S800
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Handling Company
Panasonic Production Engineering Co., Ltd.
1 Models of Multi -chamber -type sputtering device S800
| Product Image | Part Number | Price (excluding tax) | Number of process modules | Process gas species | Supported board size | Target size |
|---|---|---|---|---|---|---|
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S800 |
Available upon quote | Max. 3 rooms | AR, N2, O2 | φ4 ~ φ8 inch | φ200, φ250, φ300, φ350, φ400mm |
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About Company Handling This Product
Panasonic Production Engineering Co., Ltd.
- Japan
- Since 2014
- 657 employees