STM4415 | Thin film forming device multi -buspattting device
SHINKO SEIKI CO., LTD.
Price (excluding tax)
Model Filter
You can search for other models from each index. The displayed value is the value of the currently selected part number.
Achievement of each room 压 Power / Spatta room
Achievement of each room 压 Power / etching room
Achievement of each room 压 Power / transport room
Cathode specification / 1st spatta room
Cathode specification / 2nd spatta room
Each room reaches the power / cassette room
Equipment configuration / Sputta room
Equipment configuration / cassette room
Equipment configuration / etching room
Equipment configuration / transport room
Method of operation
Process performance / board heating
Process performance / etching distribution
Process performance / membrane thickening
Processing board
Sputta direction
Cathode specification / 3rd spatta room
Cathode specification / 4th Spatta Room
-
Part Number
STM4415
-
Handling Company
SHINKO SEIKI CO., LTD.
Thin film forming device multi -buspattting device STM4415's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Achievement of each room 压 Power / Spatta room | Achievement of each room 压 Power / etching room | Achievement of each room 压 Power / transport room | Cathode specification / 1st spatta room | Cathode specification / 2nd spatta room | Cathode specification / 3rd spatta room | Cathode specification / 4th Spatta Room | Each room reaches the power / cassette room | Equipment configuration / Sputta room | Equipment configuration / cassette room | Equipment configuration / etching room | Equipment configuration / transport room | Method of operation | Process performance / board heating | Process performance / etching distribution | Process performance / membrane thickening | Processing board | Sputta direction |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
Available upon quote | 2.0 x 10-⁵ PA or less | 9.9 x 10-⁶ PA or less | 5.0 x 10-⁵ PA or less | ¢ 300mm x 1 | ¢ 300mm x 1 | ¢ 300mm x 1 | ¢ 300mm x 1 | 9.9 x 10-⁶ PA or less | 4 rooms | One room | One room | One room | Fully automatic CTOC method | 300 ° C | Within ± 10%(¢ 180) | Within ± 5%(¢ 180) | ¢ 200mm board | up |
There are 3 models for this product.
Customers who viewed this product also viewed
Other products of SHINKO SEIKI CO., LTD.
View more products of SHINKO SEIKI CO., LTD.
About Company Handling This Product
- Japan
- Since 1949