ULVAC Sales Co., Ltd.'s Company Profile and Products

The GP-G series is a constant temperature Pirani vacuum gauge that utilizes gas heat conduction. Platinum (Pt) is used for the ...

• Meters & Instruments

• Pirani Vacuum Gauge

■Vacuum rubber hose Be sure to use a vacuum rubber hose specifically designed for vacuum when connecting the vacuum pump to con...

• Hoses / Tubes

• Vacuum Hose

A portable aspirator with a built-in diaphragm dry vacuum pump. Ideal for reducing pressure in rotary evaporators, centrifugal ...

• Pumps

• Aspirators

■Summary This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This is a device that can be used in a wide range of applications, based on ULVAC's extensive film-forming technology ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The ENTRONTM-EX2 W300 multi-chamber sputtering system is a state-of-the-art platform that connects a variety of proces...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The multi-chamber device ENTRONTM N300 is a just-fit device that provides appropriate investment efficiency. In additi...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SPW series is a roll-up type sputtering device that can form multilayer films such as optical films and metals on ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, an...

• Machining / Machine Tools

• Sputtering Equipment

■Summary ULVAC has a lineup of materials development experiment systems for organic EL, mass production cluster systems, and in...

• Machining / Machine Tools

• Deposition Equipment

■Summary This is a film deposition device that evaporates metals, oxides, etc. while continuously winding plastic film, paper, ...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substr...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump an...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation de...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation devi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts air-cooled diffusion pump (200L/sec) + oil rotary pump. Low-cost, compact vacuum evaporation equipment (resista...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The CC-200/400 load-lock plasma CVD equipment is small and easy to use, and is suitable for everything from research a...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary Single wafer PE-CVD equipment CME-200E/400 is a PE-CVD equipment for mass production that is ideal for forming silicon...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 ...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary The NE-5700/NE-7800 dry etching equipment for mass production is a scalable etching equipment that supports from one c...

• Machining / Machine Tools

• Etching Equipment

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a ...

• Machining / Machine Tools

• Etching Equipment

■Summary NLD dry etching for research and development NLD-570 is a dry etching system equipped with low pressure, low electron ...

• Machining / Machine Tools

• Etching Equipment

■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult...

• Machining / Machine Tools

• Etching Equipment

■Summary The high-density plasma etching system NE-550EX for research and development is a magnetic field ICP (ISM=Inductively ...

• Machining / Machine Tools

• Etching Equipment

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Machining / Machine Tools

• Etching Equipment

■Summary The Luminous NA series is a wafer size-free ashing system that can handle a wide range of processes from critical next...

• Semiconductor Manufacturing

• PVDF

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process ...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technolog...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC. ■Applications Ion i...

• Semiconductor Manufacturing

• Ion Implanters

■Summary The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to...

• Semiconductor Manufacturing

• Ion Implanters

■Summary ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environ...

• Dryers

• Vacuum Dryers

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, sintering, brazing, annealing, etc. of v...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary It can be widely used for vacuum heat treatment such as heat treatment, brazing, and sintering of various metal parts....

• Machining / Machine Tools

• Vacuum Furnaces

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary This is a device for brazing heat exchangers such as EGR coolers, radiators, and evaporators. We have a rich lineup ra...

• Machining / Machine Tools

• Brazing Machine

■Summary The vacuum sintering furnace FSC series is a sintering device for magnets, TA capacitors, carbide tools, etc. The in-l...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary Since manufacturing the first machine in 1957, we have delivered more than 200 units both domestically and internation...

• Machining / Machine Tools

• Metal Melting Furnaces

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, brazing, and sintering of var...

• Machining / Machine Tools

• Heat Treating Furnaces

■Summary This is a technology that directly injects a liquid into a vacuum, generates frozen particles through self-freezing th...

• Machining / Machine Tools

• Freeze Dryers

■Summary Freeze-vacuum drying equipment for small-scale production and testing in the pharmaceutical field requires space-savin...

• Machining / Machine Tools

• Freeze Dryers

■Summary This equipment is intended for vacuum distillation processing. It is possible to distill highly heat-sensitive substan...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a leak test device that uses helium as the detection gas. This is an automatic helium leak test device that in...

• Test Equipment

• Leak Testers

■Summary CFS treatment is completely different from conventional pretreatment and surface treatment.It mixes a small amount of ...

■Summary A dry vacuum pump that achieves both high-speed pumping and low power consumption. With a lineup of 4 models, you can ...

• Pumps

• Vacuum Pumps

■Summary The dry vacuum pump LR/HR/UR series achieves high durability in hard processes such as CVD and etching by effectively ...

• Pumps

• Vacuum Pumps

■Summary The dry vacuum pump CR series VerB is an air-cooled roots-type dry vacuum pump that has obtained international standar...

• Pumps

• Vacuum Pumps

■Summary The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR/HR s...

• Pumps

• Vacuum Pumps

■Summary ECO-SHOCK is an attachment that significantly reduces power consumption by attaching it to a dry pump. The ES4A is ide...

■Summary ECO-SHOCK is a revolutionary attachment that allows you to significantly save energy by attaching it to your current d...

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features...

• Pumps

• Vacuum Pumps

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features...

• Pumps

• Vacuum Pumps

■Summary This is a vacuum pump that performs evacuation through the reciprocating motion of a thin rubber membrane (diaphragm)....

• Pumps

• Vacuum Pumps

■Summary This is a vacuum pump that performs evacuation through the reciprocating motion of a thin rubber membrane (diaphragm)....

• Pumps

• Vacuum Pumps

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ...

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ...

• Pumps

• Vacuum Pumps

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Featur...

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/With motor lead wire crimp terminal ■Features ・Stand...

• Pumps

• Vacuum Pumps

■Summary VD series Ver.C is an oil rotary vacuum pump equipped with ULVAC's original high efficiency (IE3) multi-voltage motor....

• Pumps

• Vacuum Pumps

■Summary The VS series is a single-stage rotary vane type oil rotary vacuum pump. The simplified structure has made it smaller ...

• Pumps

• Vacuum Pumps

■Summary VS650A/VS750A is a single stage rotary vane oil rotary vacuum pump. The large displacement provides stable pumping per...

• Pumps

• Vacuum Pumps

■Summary The PKS series is a large oscillating piston type oil rotary vacuum pump that is extremely robust and has stable exhau...

• Pumps

• Vacuum Pumps

■Summary The PVD series is a small two-stage rotary vane oil rotary vacuum pump (rotary pump). A belt-driven, low-speed rotary ...

• Pumps

• Vacuum Pumps

■Summary When starting an oil rotary vacuum pump or working in a low vacuum, the oil from the pump is discharged along with the...

• Purification Equipment

• Oil Traps

■Summary A rotary vane type vacuum pump that uses lubricating oil. A vacuum pump with high performance, low noise and high reli...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary 1-stage exhaust system/Built-in thermal protector/Power cord with plug/Switch included ■Features ・Oil rotary vacuum ...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug/With switch ...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug ■Features ...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/With gas ballast mechanism/Built-in thermal protector/Power cord with plug ■Features ・Oil r...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/With switch ■Features - Large ...

• Pumps

• Vacuum Pumps

■Summary The YMV series is a stand unit for combining a mechanical booster pump and an oil rotary vacuum pump. Four types of mo...

■Summary The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturi...

• Pumps

• Booster Pumps

■Summary PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure drive type c...

• Pumps

• Booster Pumps

■Summary The large PMB series is a belt-driven, low-speed mechanical booster pump. In combination with a robust rocking piston ...

• Pumps

• Booster Pumps

■Summary Roots type/effective pumping speed display/with various protection functions ■Features ・A small type of Roots-type v...

• Pumps

• Vacuum Pumps

■Summary Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments...

■Summary Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments...

■Summary Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments...

■Summary Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments...

■Summary Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments...

■Summary GST-07L-B is a sputter ion pump control that has achieved high functionality and reliability thanks to ULVAC's extensi...

■Summary This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In considera...

• Purification Equipment

• Exhaust Systems

■Summary YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuati...

• Purification Equipment

• Exhaust Systems

■Summary A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and contro...

• Pumps

• Vacuum Pumps

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The YTP series is a simple high vacuum pumping unit consisting of a ULVAC turbo molecular pump (UTM series), a rotary ...

• Purification Equipment

• Exhaust Systems

■Summary This is a composite vane-type turbomolecular pump that uses digital 5-axis control magnetic bearings. UTM-FH and UTM-F...

• Pumps

• Vacuum Pumps

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The ULVAC turbo molecular pump UTM series uses a high-performance bearing that is different from general bearings and ...

• Pumps

• Vacuum Pumps

■Summary ULVAC's ULK type oil diffusion pump is a high vacuum pump that is compact and designed with large critical back pressu...

• Pumps

• Vacuum Pumps

■Summary ULVAC's PFL oil diffusion pumps are designed and manufactured using years of research and extensive manufacturing expe...

• Pumps

• Vacuum Pumps

■Summary ULVAC's PBL type oil diffusion ejector pump is a diffusion pump that can increase pumping speed in the medium vacuum r...

• Pumps

• Vacuum Pumps

■Summary ULVAC Cryo has been used in many fields such as electronics, optics, solar energy, nuclear fusion, space development, ...

• Pumps

• Vacuum Pumps

■Summary To save space, we use L-type pumps that are lower in height, and multi-systems that operate multiple pumps with one co...

• Pumps

• Vacuum Pumps

■Summary The Super Trap, which uses a helium refrigerator, greatly increases the speed at which moisture is pumped out, contrib...

• Pumps

• Vacuum Pumps

■Summary This cryopump is equipped with a "rapid room temperature regeneration system" that significantly shortens the regenera...

• Pumps

• Vacuum Pumps

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary Mechanical booster pump (833L/min) + oil rotary vacuum pump. This is a compact high vacuum exhaust system that compact...

• Pumps

• Booster Pumps

■Summary Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacu...

• Purification Equipment

• Exhaust Systems

■Summary Turbo molecular pump (345L/sec) + scroll pump. Ultimate pressure 10^-5Pa class. Necessary equipment such as the main p...

• Purification Equipment

• Exhaust Systems

■Summary Turbo molecular pump (345L/sec) + oil rotary vacuum pump. Ultimate pressure is 10^-5Pa. Necessary equipment such as th...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary The CCMT-D series is a capacitance manometer whose ceramic diaphragm deforms due to changes in gas pressure and detect...

• Meters & Instruments

• Vacuum Gauges

■Summary The G-TRAN series is a vacuum gauge developed with the concepts of (1) cost reduction, (2) space saving, and (3) wirin...

• Meters & Instruments

• Vacuum Gauges

■Summary This is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measure...

• Meters & Instruments

• Vacuum Gauges

■Summary This is a new series of transducer-type vacuum gauges "G-TRAN series multi-ion gauge" that can connect probes with dif...

• Meters & Instruments

• Vacuum Gauges

■Summary This is a pressure sensor unit that uses a semiconductor thin film element that can accurately measure near atmospheri...

• Meters & Instruments

• Vacuum Gauges

■Summary Pirani vacuum gauge that can measure a wide range from atmospheric pressure to 5×10^-2Pa. Furthermore, this vacuum gau...

• Meters & Instruments

• Vacuum Gauges

■Summary The sensor unit (SP1) is a Pirani gauge type measurement unit of the G-TRAN series. The sensor unit has a structure in...

• Meters & Instruments

• Vacuum Gauges

■Summary G-TRAN series inverted magnetron type cold cathode gauge. Since no filament is used, there is no need to worry about w...

• Meters & Instruments

• Vacuum Gauges

■Summary This display is a 1-channel display compatible with all G-TRAN series vacuum gauges and CCM series. By connecting it t...

• Meters & Instruments

• Vacuum Gauges

■Summary The 4-channel display unit can connect up to 4 measuring units for simultaneous measurement and display. Equipped with...

• Meters & Instruments

• Vacuum Gauges

■Summary Qualitative analysis of desorbed gas using a mass spectrometer While heating the sample using an infrared gold image f...

• Meters & Instruments

• Gas Analyzers

■Summary ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pre...

• Meters & Instruments

• Gas Analyzers

■Summary ULVAC's new residual gas analyzer (RGA) delivers revolutionary simplicity and ease of use. Introducing a new standard ...

• Meters & Instruments

• Gas Analyzers

■Summary ULVAC's new residual gas analyzer (compatible with Ethernet communication) is revolutionary in its simplicity and ease...

• Meters & Instruments

• Gas Analyzers

■Summary The "Qulee HGM" is a high-end model of ULVAC's residual gas analyzer Qulee series, which has been realized with revolu...

• Meters & Instruments

• Gas Analyzers

■Summary The "Qulee HGM2" is a high-end model of ULVAC's new residual gas analyzer Qulee series (Ethernet communication compati...

• Meters & Instruments

• Gas Analyzers

■Summary Reactive process gas monitor Qulee RGM2-202/RGM2-302 is a process monitor with a differential exhaust system that supp...

• Meters & Instruments

• Gas Analyzers

■Summary The quadrupole mass spectrometer with differential pumping system kit (Qulee with YTP-H) is equipped with enhanced fun...

• Measuring Equipment

• Mass Spectrometers

■Summary “Qulee QCS” is software compatible with ULVAC's residual gas analyzer/process gas monitor. This software is compatible...

■Summary “Qulee QCS” is software compatible with ULVAC's residual gas analyzer/process gas monitor. This software is compatible...

■Summary The HELIOT900 series is a leak detector with a high pumping speed and excellent convenience. We guarantee the best per...

• Sensors

• Leak Detectors

■Summary A leak detector specially designed for automatic helium leak test systems. ■Applications ・Automatic leak test system...

• Sensors

• Leak Detectors

■Lightweight and compact portable type The UNECS series is a spectroscopic ellipsometer that measures the thickness and refract...

• Meters & Instruments

• Ellipsometers

■Manual stage type compatible with Φ150mm The UNECS series is a spectroscopic ellipsometer that measures the thickness and refr...

• Meters & Instruments

• Ellipsometers

■Automatic stage type that allows mapping measurement The UNECS series is a spectroscopic ellipsometer that measures the thickn...

• Meters & Instruments

• Ellipsometers

■Built-in type that can be integrated into various devices The UNECS series is a spectroscopic ellipsometer that measures the t...

• Meters & Instruments

• Ellipsometers

■Summary P-7/P-17 is a stylus profiler manufactured by KLA-Tencor that has a variety of functions such as excellent measurement...

■Summary P-170 is a model based on the proven P-17 with an automatic transport mechanism added. It is equipped as standard with...

■Summary Alpha-Step D-500/D-600 is a stylus profiler manufactured by KLA-Tencor that measures the step (film thickness), roughn...

■Summary The CRTM-9200 is a successor to the CRTM-9100G, inheriting both functions and design, basically maintaining compatibil...

■Summary CRTM-6000G is a crystal oscillation type deposition controller that has excellent resolution and can monitor and contr...

■Summary CRTS-M6 is a rotary multi-sensor developed for the crystal oscillation film deposition controller CRTM series. It can ...

■Summary CRTS-12NS is a rotary multi-sensor developed for the CRTM series of crystal oscillation film deposition controllers. I...

■Summary PHIX-tool is an automatic micro-XPS device that achieves high-performance XPS with easy operation. Features ■Excellen...

• Analyzers

• Spectroscopic Analyzer

■Summary Auger electron spectroscopy (AES) is an analytical method that measures the energy of Auger electrons emitted when a s...

• Analyzers

• Spectroscopic Analyzer

■Summary Auger Electron Spectroscopy (AES) is a method to obtain information about elemental composition by measuring the spect...

• Analyzers

• Spectroscopic Analyzer

■Summary The nanoTOF II inherits the triple focus electrostatic analyzer (TRIFT type analyzer) with excellent ion transmission ...

• Measuring Equipment

• Mass Spectrometers

■Summary Secondary ion mass spectrometry (SIMS) is a method that highly sensitively measures elemental distribution in the dept...

• Measuring Equipment

• Mass Spectrometers

■Summary This ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm,...

• Measuring Equipment

• Spectroscopes

■Summary ・Low price ・Can accelerate up to 2kV ・With port aligner ・Adjust the length from the mounting flange to the tip of ...

• Measuring Equipment

• Spectroscopes

■Summary Measures thermal conductivity of a wide range of materials from polymers to metals. This is a device that measures spe...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Significantly reduces measurement time. This device measures the three thermal constants (thermal diffusivity, specifi...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Thermal diffusivity measurement in ultra-high temperature ranges up to 3,000℃. Measurement of thermal diffusivity of m...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary For research and development and quality control of thermally conductive polymer materials. It is possible to evaluate...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Easily evaluate thin film samples that are difficult to measure using the flash method. This is a device that measures...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Evaluation of in-plane thermal conductivity of various film-like membranes. This device measures the in-plane thermal ...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Ultra-high sensitivity relative specific heat measurement is possible. This device is an ultra-high sensitivity relati...

■Summary Evaluation of thermal conductivity of polymers, glass, etc. This device is a steady method thermal conductivity measur...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary In-plane distribution evaluation and analysis of materials. This device simultaneously measures the in-plane two-dimen...

■Summary A series that accommodates special specifications such as the characteristics of various thermoelectric materials and ...

■Summary The world's best Raman imaging now comes with innovative usability. Raman spectroscopy has evolved to this point. Nan...

• Observation Equipment

• Laser Scanning Microscoppes

■Summary High speed heat treatment from 2in to 300mm. Hold for 10 seconds. By combining high-speed heating technology, we manuf...

• Heat Sources

• Industrial Furnaces

■Summary This is a tabletop ultra-high temperature lamp annealing device that can heat expensive samples such as SiC and small ...

• Heat Sources

• Industrial Furnaces

■Summary Lamp annealing equipment up to 6 inches. Silicide formation for individual semiconductor processes and process anneali...

• Heat Sources

• Industrial Furnaces

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary Rapidly heats up to 1,800℃ in 1 minute. This is a compact infrared gold image furnace that can heat up to 1,800℃. It c...

• Heat Sources

• Industrial Furnaces

■Summary This device is a tabletop lamp heating device that allows heat treatment of samples up to 50 mm square. Since the rel...

• Heat Sources

• Industrial Furnaces

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces

■Summary A tabletop lamp heating device that does not use cooling water. Cooling is done using an air-cooling fan, so you can h...

• Heat Sources

• Industrial Furnaces

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary For process development from solar cells to compound semiconductors, etc. In addition to the functions of the QHC seri...

• Heat Sources

• Industrial Furnaces

■Summary It is possible to accurately observe the wettability of the substrate and ingot. Based on the wettability test/contact...

■Summary The CAS series uses an infrared gold image furnace to achieve rapid heating and cooling, direct temperature control of...

• Machining / Machine Tools

• Heating Apparatus

■Summary Forming a heating system according to the purpose of heat treatment. This equipment has a heating furnace and heating ...

• Machining / Machine Tools

• Heat Treating Furnaces

■Summary DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and th...

• Power Supplies

• Pulse Power Supplies

■Summary DC-10 and DC-20 are DC power supplies for sputtering with 10kW and 20kW output. It is composed of reliable parts and c...

• Power Supplies

• DC Power Supplies

■Summary DC-2 and DC-4 are DC power supplies for sputtering with 2kW and 4kW output. High control accuracy provides excellent r...

• Power Supplies

• DC Power Supplies

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and ca...

• Power Supplies

• DC Power Supplies

■Summary The MFU-20K is a unit that converts DC output to bipolar pulse output by adding it to a ULVAC DC power supply. Achieve...

■Summary The A2K series is an abnormal discharge prevention unit that neutralizes the charge on the target by applying pulses o...

■Summary The RFS-N series is a 13.56MHz RF power supply for plasma processes with an output of 0.5kW/1/kW/3kW/5kW. Equipped wit...

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on im...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary EGP-1G is an electron beam evaporation source for optical film deposition that reduces costs by adopting a simple 180º...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is desi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based...

• Robots

• Transport Robots

■Summary COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis. ■Applications ・Automatic wafe...

• Robots

• Transport Robots

■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Autom...

• Robots

• Transport Robots

■Summary The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc...

• Robots

• Transport Robots

■Summary ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and p...

• Robots

• Transport Robots

■Summary Depoview is software that collects data on film thickness, deposition rate, power, and crystal oscillator frequency fo...

■Summary FABISEQ is software that collects and displays data from process equipment in graphs. By visualizing equipment data, w...

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary SUS valve from 5/8 to 6 inch. The manual type shaft seal can be selected from bellows, and the connection flange can b...

• Valves

• Vacuum Valves

■Summary Large diameter SS valve from 20B to 36B. The shaft seal is an O-ring and the connection flange is JIS-VF for double-ac...

• Valves

• Vacuum Valves

■Summary This is a large pendulum valve (gate valve) developed using ULVAC's unique technology. Compatible with large vacuum eq...

• Valves

• Vacuum Gate Valves

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Summary The VAP series is a compressed air operated high vacuum gate valve developed based on our extensive technology and exp...

• Valves

• Vacuum Gate Valves

■Summary This is an ULVAC standard flange that complies with JIS.

• Fittings

• Flanges

We offer blank flanges for ISO standard quick (release) coupling flanges.

• Sealing Devices

• Blank Flanges

We offer long couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

We offer short couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

ISO standard quick (release) coupling flange O-ring seats (with fluororubber (FPM) O-rings) are available.

• Fittings

• Flanges

We offer aluminum clamps with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

Vacuum flange I-type pipes are available. *SS product also available (with Ni plating) *In addition, we also accept custom-mad...

• Sealing Devices

• Vacuum Flanges

Vacuum flange L-type tube/T-type tube are available. *SS product also available (with Ni plating) *We also accept custom-made ...

• Sealing Devices

• Vacuum Flanges

Vacuum flange Flanges with intake pipes are available. ■Note -Products and data are subject to change without notice. - Some p...

• Sealing Devices

• Vacuum Flanges

KF-ISO piping nipples are available.

• Fittings

• Pipe Fittings

KF-ISO piping elbows are available.

• Fittings

• Elbows

We have tees for KF-ISO piping available.

• Fittings

• Pipe Fittings

We have KF-ISO piping cloth available.

• Fittings

• Pipe Fittings

We have KF-ISO piping nozzles available.

• Fittings

• Pipe Fittings

We offer KF replacement flanges for KF-ISO piping. Other sizes are also available.

• Fittings

• Flanges

Flexible hoses for KF-ISO piping are available for ISO-KF. *In addition, we also accept custom-made products such as shapes an...

• Hoses / Tubes

• Flexible Hoses

■Summary Genuine oil "ULVOIL" not only brings out the full performance of vacuum pumps, but also extends pump life and maintena...

• Protective Materials & Equipment

• Lubricants

■Summary The genuine oil "ULVOIL" D series is a special oil developed for oil diffusion pumps, and B-6 is for oil diffusion eje...

• Protective Materials & Equipment

• Lubricants

■Vacuum pump oil BARRIERTA J FLUID series Semiconductor manufacturing equipment, vacuum pump oil, hydraulic oil, heat transfer ...

• Protective Materials & Equipment

• Lubricants

■Vacuum pump oil FOMBLIN Y-LVAC series Vacuum pump oil, vacuum sealing material, hydraulic oil, heat medium, various lubricants...

• Protective Materials & Equipment

• Lubricants

■Vacuum grease BARRIERTA JFE 552HV, SUPER IS/V (fluorinated synthetic oil) Clean room/Sputtering equipment/Vacuum jig equipment...

• Protective Materials & Equipment

• Grease

■Summary This is a light gray, translucent, hard, grease-like product that is based on highly refined, highly viscous dimethyl ...

• Protective Materials & Equipment

• Grease

■Summary OR-LUBE G1/3 Grease is a grease based on highly purified paraffin oil with the addition of synthetic molybdenum, etc. ...

• Protective Materials & Equipment

• Grease

■Summary The Z series is a high-vacuum fluorine grease that uses fluorine-based synthetic oil as the base oil and has PTFE (thi...

• Protective Materials & Equipment

• Grease

■Summary You can check the model and dimensions of the probe of various vacuum gauges. Please use it when replacing or purchasi...

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Fastening Components

• O-Rings

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Features The ULVAC standard Kosan gasket has a thick wire diameter, so it has a large crushing margin and is designed to preve...

• Fastening Components

• Gaskets

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Fastening Components

• O-Rings

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Features The ULVAC standard Kozan string gasket has a thick wire diameter, so it has a large crushing allowance and is designe...

• Fastening Components

• Gaskets

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Fastening Components

• O-Rings

■Features JIS standard O-ring V series (for vacuum flanges) is available. ■Note Products and data are subject to change withou...

• Fastening Components

• O-Rings

■Features JIS standard O-ring G series (for fixing on cylindrical surfaces and on flat surfaces) is available. ■Note Products ...

• Fastening Components

• O-Rings

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Fastening Components

• O-Rings

■We supply high quality and stable materials to the FPD (Flat Panel Display) market, which is becoming more diverse and larger....

■Summary ULVAC's semiconductor target materials, a leader in cutting-edge thin film materials, are ・Low particles ・Homogeneou...

■Summary ULVAC manufactures and sells IGZO targets used in IGZO TAOS (transparent amorphous oxide semiconductor using In, Ga, Z...

■Summary ULVAC's high-purity vacuum evaporation materials are used in all thin film electronic device fields. Vapor deposition ...

■Summary ULVAC's tantalum/niobium plates have fine and uniform particle sizes. This results in a high press yield, minimal surf...

■Summary Nanometal ink, produced using ULVAC's proprietary evaporation method in gas, is a new type of conductive ink in which ...

■Summary ULVAC Sales has begun cooperating with the sales of T&A (Transmittance Analyzer), a gas barrier film gas permeability ...

• Measuring Equipment

• Transmission Meters