ULVAC Sales Co., Ltd.

■Summary The quadrupole mass spectrometer with differential pumping system kit (Qulee with YTP-H) is equipped with enhanced fun...

• Measuring Equipment

• Mass Spectrometers

■Summary The Z series is a high-vacuum fluorine grease that uses fluorine-based synthetic oil as the base oil and has PTFE (thi...

• Protective Materials & Equipment

• Grease

■Summary OR-LUBE G1/3 Grease is a grease based on highly purified paraffin oil with the addition of synthetic molybdenum, etc. ...

• Protective Materials & Equipment

• Grease

■Summary This is a device that can be used in a wide range of applications, based on ULVAC's extensive film-forming technology ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This is a technology that directly injects a liquid into a vacuum, generates frozen particles through self-freezing th...

• Machining / Machine Tools

• Freeze Dryers

■Summary Large diameter SS valve from 20B to 36B. The shaft seal is an O-ring and the connection flange is JIS-VF for double-ac...

• Valves

• Vacuum Valves

■Summary The ULVAC turbo molecular pump UTM series uses a high-performance bearing that is different from general bearings and ...

• Pumps

• Vacuum Pumps

■Automatic stage type that allows mapping measurement The UNECS series is a spectroscopic ellipsometer that measures the thickn...

• Meters & Instruments

• Ellipsometers

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The high-density plasma etching system NE-550EX for research and development is a magnetic field ICP (ISM=Inductively ...

• Machining / Machine Tools

• Etching Equipment

■Summary This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation...

• Machining / Machine Tools

• Sputtering Equipment

■Summary SUS valve from 5/8 to 6 inch. The manual type shaft seal can be selected from bellows, and the connection flange can b...

• Valves

• Vacuum Valves

■Vacuum pump oil FOMBLIN Y-LVAC series Vacuum pump oil, vacuum sealing material, hydraulic oil, heat medium, various lubricants...

• Protective Materials & Equipment

• Lubricants

■Summary ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environ...

• Dryers

• Vacuum Dryers

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process ...

• Semiconductor Manufacturing

• Ion Implanters

■Vacuum pump oil BARRIERTA J FLUID series Semiconductor manufacturing equipment, vacuum pump oil, hydraulic oil, heat transfer ...

• Protective Materials & Equipment

• Lubricants

■Summary Freeze-vacuum drying equipment for small-scale production and testing in the pharmaceutical field requires space-savin...

• Machining / Machine Tools

• Freeze Dryers

■Summary This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC. ■Applications Ion i...

• Semiconductor Manufacturing

• Ion Implanters

■Built-in type that can be integrated into various devices The UNECS series is a spectroscopic ellipsometer that measures the t...

• Meters & Instruments

• Ellipsometers

■Summary This is a film deposition device that evaporates metals, oxides, etc. while continuously winding plastic film, paper, ...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary NLD dry etching for research and development NLD-570 is a dry etching system equipped with low pressure, low electron ...

• Machining / Machine Tools

• Etching Equipment

■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 ...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary The genuine oil "ULVOIL" D series is a special oil developed for oil diffusion pumps, and B-6 is for oil diffusion eje...

• Protective Materials & Equipment

• Lubricants

■Summary Pirani vacuum gauge that can measure a wide range from atmospheric pressure to 5×10^-2Pa. Furthermore, this vacuum gau...

• Meters & Instruments

• Vacuum Gauges

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary ULVAC has a lineup of materials development experiment systems for organic EL, mass production cluster systems, and in...

• Machining / Machine Tools

• Deposition Equipment

■Summary This equipment is intended for vacuum distillation processing. It is possible to distill highly heat-sensitive substan...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats