Compatible with chemicals that require high-temperature transfer air driven bellows pump FS-100HT2
IWAKI CO., LTD.
About This Product
■ High -temperature large flow transfer
Transportation at MAX180 ° C and maximum flow rate is 100L/min. For chemicals that require high -temperature transfer such as CARO (SPM) and H3PO4, the circulation flow is expected to be about 1.8 times compared to our conventional products (55L/min → 100L/min).
■ Improvement of cleaning efficiency
By improving circulation flow, the efficiency of particle, metal pollution on the wafer surface, and the removal of organic pollution can be improved, reducing the cleaning time due to the miniaturization of the circuit pattern.
■ Contamifry
All fluorine resin is adopted for the bond part. The pump outer periphery is also designed without metal exposure, with fluorine resin coating. Drug -fluid transfer such as acid, alkali, and overwhelming is possible for semiconductor applications.
■ Reduction of weight of about 15 %
By optimizing the parts shape, the weight of our conventional products (80-100L/min class) has been reduced by about 15 %. Pump installation and replacement worker burden can be reduced.
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Product
Compatible with chemicals that require high-temperature transfer air driven bellows pump FS-100HT2
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Handling Company
IWAKI CO., LTD.
1 Models of Compatible with chemicals that require high-temperature transfer air driven bellows pump FS-100HT2
| Product Image | Part Number | Price (excluding tax) | Liquid temperature range | Major material | Maximum air consumption | Maximum discharge | Maximum number of strokes | Supply air pressure range |
|---|---|---|---|---|---|---|---|---|
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FS-100HT2 |
Available upon quote | 10-180˚C | PTFE, PFA | 1,210NL/min | 100L/min | 120SPM | 0.15 ~ 0.5MPa |
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About Company Handling This Product
- Japan
- Since 1956
- 994 employees