Significant resistance Contamifrey Photo Regist Dispen Spump PDS-105R
IWAKI CO., LTD.
About This Product
■ Sigary resistance
Since a high -torque stating motor is used for the drive source, even if the discharge load is increased due to clogging and viscosity of the filter, the discharge amount is almost reduced, and the exhausting accuracy is maintained. Therefore, the setting of the application amount is minimal and can significantly reduce the use of the resist solution.
・ Discharge accuracy: ± 0.3%or less (F.S.)
・ Linearity: ± 0.5% (F.S.) Note: In the case of PDS-105R
・ Resolution ability: 0.01ml or less
■ Contamifry
The pump portion adopts a smooth tube hulam structure with a smooth inside and a low dead volume. There are few residents of the resist solution, preventing the occurrence of particles.
■ Compatible with various coat processes
Since the discharge speed can be changed arbitrarily within one shot, it is possible to support various registered coat processes such as small amounts and short -term application.
■ Shortening of downtime
By monitoring the discharge pressure with the internal pressure sensor (optional), you can manage the when replacing the filter. In addition, the setting of the discharge / discharge time is OK only by entering the controller. You can shorten downtime without the hassle of operators.
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Product
Significant resistance Contamifrey Photo Regist Dispen Spump PDS-105R
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Handling Company
IWAKI CO., LTD.
1 Models of Significant resistance Contamifrey Photo Regist Dispen Spump PDS-105R
| Product Image | Part Number | Price (excluding tax) | Discharge | Maximum discharge pressure | Maximum discharge speed | Maximum handling liquid viscosity | Repetition | Suction speed |
|---|---|---|---|---|---|---|---|---|
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PDS-105R |
Available upon quote | 5.0ml/shot | 0.15MPa | 0.1 ~ 4.0ml/sec | 200MPa · S | ± 0.3%or less (F.S.) | 0.1 ~ 3.0ml/sec |
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About Company Handling This Product
- Japan
- Since 1956
- 994 employees