Ideal for applying a semiconductor manufacturing process, Ideal for applying air driving dispenser SB series
IWAKI CO., LTD.
About This Product
■ High precision
Including photo registers, the chemical solution is accurately measured and distributed. In order to optimize the amount of the resist, the distribution accuracy per shot is increased, and the sackback (option) is attached to prevent the resist from dropping the regist from the discharge end.
The dead volume inside the bellows is extremely small, and the liquid is not staying. The low -speed injection of the resist is possible by adopting a sealless structure and a short -speed cylinder, preventing air entry into the photo resist.
■ Lightweight / compact design
The pump installation form is prepared for a style that can be supplied for either vertical or horizontal type (excluding SB-4K/5/6), and you can select the optimal shape for system embodiment. Compact design ensures space for peripheral devices.
In addition, a cylinder with a mechanical stopper that controls a subtle discharge amount with one pump, and a cylinder with a sensor that can confirm the operation.
■ Made of stainless steel and fluorine resin
The welcome material material is a stainless steel (SUS304) type and a fluorine resin (PTFE, PFA) type. Excellent corrosion resistance, there is no pollution of the liquid, and liquid quality control such as high resolution and high purity photo resist is safe.
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Product
Ideal for applying a semiconductor manufacturing process, Ideal for applying air driving dispenser SB series
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Handling Company
IWAKI CO., LTD.
1 Models of Ideal for applying a semiconductor manufacturing process, Ideal for applying air driving dispenser SB series
| Product Image | Part Number | Price (excluding tax) | Liquid temperature range | Major material | Maximum air consumption | Maximum discharge | Maximum discharge pressure range | Supply air pressure range |
|---|---|---|---|---|---|---|---|---|
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Air driving dispenser SB series |
Available upon quote | 15 ~ 25 ℃ | SUS304 / PTFE, PFA | 1.0NL/Stroke | 100ml/stroke | 0.05 ~ 0.1MPa | 0.15 ~ 0.5MPa |
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About Company Handling This Product
- Japan
- Since 1956
- 994 employees