Significant performance improved drug solution replenishment pump CFD
IWAKI CO., LTD.
About This Product
■ Improvement of distribution performance
The discharge is 1 ml per SHOT, and the distribution performance has been greatly improved compared to the past. By injecting the minimum required when necessary, the concentration of the wafer cleaning solution can be performed accurately. In addition, the concentration overshoot can be suppressed, which leads to the cost reduction of the cleaning solution. In addition, a built -in Saihon prevention mechanism is made to prevent the leakage of chemicals.
■ Rotal food resistant structure
The bonded part is composed of all -flexible resin (PTFE, PFA, PCTFE), and can be used in semiconductor use, alkaline, and overwhelming drugs. In addition, the external pump has a high -rotten food resistant structure by using resin (PTFE, PFA, PP, PVC) and PTFE -coated screws.
■ Compatible with a wide range of discharges
You can easily adjust the stroke length by removing the cover at the bottom of the pump. Up to 2.7 ml of discharge per SHOT is possible. (At the time of shipment, it is 1ml per 1shot.)
■ Leak sensor standard equipment
A leak sensor that can respond quickly even when a bellows is damaged is standard equipment.
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Product
Significant performance improved drug solution replenishment pump CFD
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Handling Company
IWAKI CO., LTD.
2 Models of Significant performance improved drug solution replenishment pump CFD
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Liquid temperature range | Major material | Maximum air consumption | Maximum discharge | Maximum number of strokes | Supply air pressure |
|---|---|---|---|---|---|---|---|---|
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CFD-1T-B |
Available upon quote | 20 ~ 60 ° C | PTFE, PFA, PCTFE |
2.5NL/min * Supply air pressure 0.3MPa, stroke number 30 SPM, discharge pressure 0.05MPa |
1ml/shot | 30spm | 0.15 ~ 0.3MPa |
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CFD-8T-B |
Available upon quote | 20 ~ 60 ° C | PTFE, PFA |
5.4nl/min * Supply air pressure 0.3MPa, stroke number 30 SPM, discharge pressure 0.05MPa |
8ml/shot | 30spm | 0.15 ~ 0.3MPa |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1956
- 994 employees