Wafer Cleaning Air Drive Bellows Pump FA Series
IWAKI CO., LTD.
About This Product
■ 2 types of medium temperature specifications
The FA-2 type with a small flow model and a large flow model, a large flow model FA-40VEW type, is standardized. The FA-2 type is suitable for spray-type leaf processing, and the FA-40VEW type is suitable for cleaning the 200/300mm wafer.
■ Thick bellows
The FA-40VEW type uses a thick bellows. It is a long -lasting life design that has excellent pressure resistance and can withstand long -term continuous operation.
■ Sensor drive system
Uses a sensor -driven system that switches the electromagnetic valve with a proximity switch with a built -in pump. In addition, the leak sensor is standard equipment.
■ Easy operation
If you connect to a dedicated controller, you can easily control and manage the amount of discharge.
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Product
Wafer Cleaning Air Drive Bellows Pump FA Series
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Handling Company
IWAKI CO., LTD.
2 Models of Wafer Cleaning Air Drive Bellows Pump FA Series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Liquid temperature range | Major material | Maximum air consumption | Maximum discharge | Maximum number of strokes | Supply air pressure range |
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FA-2 |
Available upon quote | 5-100 ℃ | PTFE, PFA | 50NL/min | 2L/min | 150SPM | 0.2 ~ 0.4MPa |
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FA-40 |
Available upon quote | 5-100 ℃ | PTFE, PFA | 200NL/min | 40L/min | 80SPM | 0.1 ~ 0.4MPa |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1956
- 994 employees