Achieving excellent membrane thickening and reproducibility DLC coating device
Japan Create Co., Ltd.
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Electronics & Electrical Use
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Chemical Industry Use
About This Product
■ Characteristics
・ The film source can be selected from the RF Plasma CVD method and the ionized vaporization method.
・ The heat source of the board can be selected from water -cooled and heated type.
・ Realizes excellent membrane thickening and reproducibility
・ Silence can be made to various substrate materials
・ Control for a wide range of membrane characteristics
・ Abundant accumulation data
・ It can also be used for tray transportation
■ Use
·semiconductor
・ Electronic components
・ Optical parts
・ In -vehicle parts
・ Medical parts
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Product
Achieving excellent membrane thickening and reproducibility DLC coating device
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Handling Company
Japan Create Co., Ltd.
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Categories
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Usage Scenarios
Electronics & Electrical Use / Chemical Industry Use
1 Models of Achieving excellent membrane thickening and reproducibility DLC coating device
| Product Image | Part Number | Price (excluding tax) | Board heating temperature | Board size | Control operation | Data logging | Filching gas | Pressure control | Self -cleaning gas | Transportation of the board | Vacuum exhaust | option |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
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DLC coating device |
Available upon quote | Up to 300 ° C (substrate surface) |
Round maximum φ12 inch Up to 310mm x 375mm |
Control: PLC Operation: Touch panel or PC |
External memory or PC |
DLC: Liquid / gas sauce Flooring DLC: Liquid sauce |
APC control | O2, AR, etc. | Vacuum transport robot |
Low vacuum process: MBP+DP Takamasa Process: TMP+DP |
High temperature processes of 300 ° C or higher, light emission analysis system, exhaust gas processing device, gas detector, cylinder cabinet, etc. |
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About Company Handling This Product
- Japan