Various organic and inorganic materials for film forming organic / inorganic complex membrane device VEP series
ULVAC, Inc
About This Product
The organic and inorganic composite membrane device VEP series is a device that can form a variety of organic and inorganic materials due to vapor, sputtering, plasma hypersliness, and steaming. You can freely select the processing room according to the purpose.
■ Features
・ It is possible to combine multiple film forming rooms from a single -function vacuum treatment room.
・ Continuous processing is possible in vacuum.
・ You can select a steaming source according to the steam pressure for organic materials.
・ You can connect any processing room you want in the future.
■ Use
・ Molecular device
・ Bio sensor
・ Organic EL/semiconductor
・ Inspective margin film
・ Organic function thin film
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Product
Various organic and inorganic materials for film forming organic / inorganic complex membrane device VEP series
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Handling Company
ULVAC, Inc
1 Models of Various organic and inorganic materials for film forming organic / inorganic complex membrane device VEP series
| Product Image | Part Number | Price (excluding tax) | Achievement pressure | Board size | Chamber material | Chamber size | Exhaust system | Heating board | Transportation of the board |
|---|---|---|---|---|---|---|---|---|---|
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VEP-1000 series |
Available upon quote | 10^-4pa or less | 2 inch diameter or 2 inch horns | Stainless steel | Diameter 350mm x height 650mm | Oil diffusion pump or turbo molecular pump | Maximum temperature 250 ° C | Pressure air -type horizontal transport system |
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About Company Handling This Product
- Japan
- Since 1952
- 6,235 employees