Exhaust operation / film formation operation is possible automatically batch -type high vacuum vaporetic installment device EI series
ULVAC, Inc
About This Product
The batch -type high vacuum vapor -to -vapor equipment EI series is a device for forming metals and oxides on the substrate. It is suitable for research and development and small quantities because the operation panel can automatically perform exhaust operation and film maneuvering by intensive control.
■ Features
・ Various steamed resources can be installed (EB, resistance, EB+resistance)
・ Basic board holder according to the process (lift -off, planetari, satellite etc)
・ Φ2in ~ 6inin substrate, rectangular substrate, SI, compound, glass, various substrates
・ Intensive display / operation on the liquid crystal touch panel
・ Excellent operability / function by PC (recipe function / data logging / maintenance assist function)
■ Use
・ Compound related to power devices, etc.
・ LED, LD, high -speed device
・ For various experiments
・ Other electronic parts in general
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Product
Exhaust operation / film formation operation is possible automatically batch -type high vacuum vaporetic installment device EI series
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Handling Company
ULVAC, Inc
1 Models of Exhaust operation / film formation operation is possible automatically batch -type high vacuum vaporetic installment device EI series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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EI series |
Available upon quote |
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About Company Handling This Product
- Japan
- Since 1952
- 6,235 employees