Suitable for high-viscosity applications such as LED / MEMS Photo Resisting Dissisto Spump PDS-H115
IWAKI CO., LTD.
About This Product
■ Sigary resistance
Since a high -torque stating motor is used for the drive source, even if the discharge load is increased due to clogging and viscosity of the filter, the discharge amount is almost reduced, and the exhausting accuracy is maintained. Therefore, the setting of the application amount is minimal and can significantly reduce the use of the resist solution.
■ Compatible with various coat processes
Since the discharge speed can be changed arbitrarily within one shot, it is possible to support various registered coat processes such as small amounts and short -term application.
■ Shortening of downtime
By monitoring the discharge pressure with the internal pressure sensor (optional), you can manage the when replacing the filter. In addition, the setting of the discharge / discharge time is OK only by entering the controller. You can shorten downtime without the hassle of operators.
■ Supports high viscosity applications
・ Up to 10,000 MPa • S can be handled by high viscosity solution.
-The unique structure without sliding portions can be used not only for high viscosity applications in the LED and MEMS device manufacturing process, but also for electrolytic liquid filling applications.
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Product
Suitable for high-viscosity applications such as LED / MEMS Photo Resisting Dissisto Spump PDS-H115