Park Systems Japan Co., Ltd.

Park NX10 provides reliable data at the highest nanoscale resolution. It can be easily operated at every stage, from sample set...

• Observation Equipment

• Atomic Force Microscopes

The Vario system is an element-based modular vibration isolation system consisting of at least two vibration isolation elements...

4 models listed

• Protective Materials & Equipment

• Anti Vibration Mounts

The Nano series combines high-end active vibration isolation with ultra-compact dimensions and is adopted for vibration isolati...

2 models listed

• Protective Materials & Equipment

• Vibration Isolators

i4 is a state-of-the-art active anti-vibration system. Ideal for isolating high-resolution measurement equipment from building ...

3 models listed

• Protective Materials & Equipment

• Vibration Isolators

Park NX-Wafer is an industry-leading automated AFM measurement system for semiconductor and related fabrication. Enabling wafe...

• Observation Equipment

• Atomic Force Microscopes

Park NX-Hybrid WLI is the world's first AFM system with a built-in white light interferometer for measurement, quality assuranc...

• Observation Equipment

• Atomic Force Microscopes

Park NX-Mask is a new generation photomask repair system that supports the miniaturization of devices and the increasing comple...

• Observation Equipment

• Atomic Force Microscopes

■Next-generation technology to accelerate research and development ・Adopts the first dual camera system in research AFM histor...

• Observation Equipment

• Atomic Force Microscopes

The workstation_Vario comes with a steel frame with an embedded optical breadboard as a work surface. As an extension, the surr...

3 models listed

• Protective Materials & Equipment

• Vibration Isolators

As an FA engineer, you are expected to find results, but of course errors and mistakes caused by machines cannot be tolerated. ...

• Observation Equipment

• Atomic Force Microscopes

The Referenced Spectroscopic Ellipsometer (RSE) is an ellipsometer-based reflectance meter designed for high-speed film thickne...

• Meters & Instruments

• Ellipsometers

The Park NX20 300mm is the industry's first atomic force microscope (AFM) for large samples that fully automates measurements o...

• Observation Equipment

• Atomic Force Microscopes

Workstation_i4 is designed for use with an optical microscope/microscope/SPM combination. The surface is surrounded by a scratc...

• Protective Materials & Equipment

• Vibration Isolators

The Park NX-IR is a combination of a nanoscale infrared (IR) spectrometer and an atomic force microscope (AFM) for chemical and...

• Observation Equipment

• Atomic Force Microscopes

Park NX12 is a device that integrates the sample stage of an inverted optical microscope with Park Systems' highly versatile an...

• Observation Equipment

• Atomic Force Microscopes

Identifying nanoscale defects is a very time-consuming process for engineers working with media and flat substrates. Park NX-HD...

• Observation Equipment

• Atomic Force Microscopes

The Park NX20 Lite has many unique features that make it ideal for collaborative laboratories, multivariate analysis, and wafer...

• Observation Equipment

• Atomic Force Microscopes

SIMON is specially designed for regular measurement tasks in imaging ellipsometry. The simple user interface and robustness of...

• Observation Equipment

• Video Microscopes

Park NX7 is the most economical AFM, featuring Park Systems' cutting-edge technology and designed with the same attention to de...

• Observation Equipment

• Atomic Force Microscopes

Imaging Ellipsometer EP4 is a product that combines ellipsometry and microscopy. EP4 can evaluate optical properties such as t...

• Meters & Instruments

• Ellipsometers

Park NX-IR R300 is a nanoscale infrared spectroscopy system compatible with semiconductor wafers up to 300mm. In addition to ch...

• Measuring Equipment

• Infrared Spectrophotometers

Park SmartScan™ is Park Systems' innovative operating software for AFMs. Automatic mode allows even beginners to perform high-q...

• FA Equipment

• Image Processing Systems

Park SmartAnalysis™ is atomic force microscope image processing and data analysis software for Park AFM. Next-generation image ...

• FA Equipment

• Image Processing Systems

The UltraBAM is a Brewster angle microscope designed for gas-liquid interface measurements. It can also be used on solid substr...

• Observation Equipment

• Video Microscopes

Park Systems introduces the innovative Park 3DM Series, a fully automated AFM system designed for overhang profiles, high-resol...

• Observation Equipment

• Atomic Force Microscopes

■NX-Hivac automatic vacuum control The pumping and evacuation process to the optimum vacuum condition is logically and visually...

The AFMTC sample consists of 10 ultrafine trenches (10-50 nm) and 50 nm separated lines. This calibration sample is provided to...

SmartScan™ automatic mode automatically performs all necessary imaging operations and intelligently determines optimal image qu...

• FA Equipment

• Image Processing Systems

The HMC sample consists of a series of lines offering five different width and pitch standards. This calibration sample provide...