Arios Co., Ltd.

■Summary Manufacturing ultra-high vacuum pumping equipment requires many techniques, from material selection, welding, cleaning...

• Generators

• Vacuum Generators

■Summary This equipment is a microwave plasma CVD equipment for diamond production. By making full use of our unique plasma tec...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary Small sputtering equipment SS-DC RF301 This is a film forming equipment that uses sputtering (often abbreviated as spu...

• Machining / Machine Tools

• Sputtering Equipment

■Summary Arios is a professional group with over 20 years of experience in manufacturing MBE equipment. Arios' MBE equipment su...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary In order to achieve ultra-high vacuum, it is important to accumulate each task without cutting corners. Our ultra-high...

• Controllers

• Vacuum Controllers

■Summary This device is an atmospheric particle collection device developed for the purpose of collecting aerosols (fine partic...

• Measuring Equipment

• Air Samplers

■Summary This device is a hot filament type CVD device for full-scale diamond synthesis. By selecting various options in additi...

• Machining / Machine Tools

• Deposition Equipment

Overview This device is an analytical device that can raise the temperature of a sample in an ultra-high vacuum and use a mass ...

• Meters & Instruments

• Gas Analyzers

■Summary In order to uniformly form a film on the surface of the sample, this device places the sample in a drum-shaped sample ...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary CVD is an abbreviation for Chemical Vapor Deposition, and refers to the process of supplying a raw material with gas, ...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary This device is capable of evaluating the photoluminescence (PL) of phosphors (sample) in a vacuum environment. Informa...

• Analyzers

• Spectroscopic Analyzer

■Summary This is a component that transmits rotational motion from the atmosphere side into the vacuum. This is called a rotati...

• Drive Mechanisms & Components

• Rotating Shafts

■Summary The Langmuir probe method is one of the simple methods for plasma diagnosis (measurement). Diagnose plasma electron te...

• Sensors

• Current Probes

■Device overview This device is a high vacuum heating device (annealing furnace) for heating 3" to 8" substrates and vacuum com...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary This is a hollow XYZ stage where the offset of each axis center and the distance between the two flanges can be varied...

• Stages

• XYZ Vacuum Stages

■Summary This is a system that measures plasma parameters at multiple points using the Langmuir probe method. Convenient for me...

• Sensors

• Current Probes

■Summary At Arios, we manufacture plasma experimental equipment using microwaves. Because we design everything in-house, includ...

• Machining / Machine Tools

• Plasma Cleaning Systems

■Summary The ILV-01 type interlock valve is a valve that can normally be used as a manual valve, but has the unique function of...

• Valves

• Vacuum Valves

■Summary The TLV-02 timing leak valve is a valve that opens 25 or 45 seconds after the power is turned off. Ideal for slowly op...

• Valves

• Vacuum Valves

■Summary This equipment is an experimental RF plasma equipment that consists of an RF plasma source, substrate heating mechanis...

• Machining / Machine Tools

• Plasma Cleaning Systems

■Summary Hetero-epitaxial growth equipment for diamond substrates This equipment is a special MBE equipment for the purpose of ...

• Machining / Machine Tools

• Crystallizers

■Summary A film deposition system that uses sputtering (often abbreviated as sputtering). A feature of sputtering film formatio...

• Machining / Machine Tools

• Sputtering Equipment

■Summary Three-stub tuner for coaxial cable with N type connector connection for 2.45GHz band. Previously, Arios had purchased ...

• Network-related Equipment

• Tuners

■Summary This ion beam source is a DC discharge type gridless ion source. It has an extremely simple structure based on the ope...

■Summary This is a part that allows offset of the center of each axis and angle adjustment of ±3° between the two flanges. This...

■Summary The ED series is a load lock door used to introduce samples etc. into a vacuum system. This is an open-type lid that i...

■Summary This is an atmospheric pressure plasma experimental device that allows experiments to be performed simply by connectin...

• Machining / Machine Tools

• Atmospheric pressure plasma device

■Summary Prevents film formation and damage to the viewport, which is a problem during film formation processes such as evapora...

■Summary EMIS-111Q is a quartz discharge tube type compact microwave-excited ion source. It is more compact than the microwave ...

■Summary EMIS-221C is a ceramic discharge tube type, external chamber type, magnetic field type microwave excited ion source. U...