Gas analyzer with outstanding cost performance (quadrupole mass spectrometer) Residual gas analyzer
Tokyo Instruments, Inc
About This Product
■Summary
The RGA100, RGA200, and RGA300 residual gas analyzers are low-cost residual gas analyzers in vacuum systems. A quadrupole mass spectrometer is employed for gas analysis, with detection using a Faraday cup or channeltron (optional).
The probe uses open source dual Thoriated Iridium filaments. Dedicated software is included as standard and can be completely controlled from a PC.
The gas analyzer part can be easily disassembled and is designed for easy maintenance such as cleaning. It can also be used for process monitoring purposes such as monitoring changes in partial pressure of any mass number.
■Features
・100, 200, 300 amu system
・Measurement resolution 1 amu or less
・Minimum detection partial pressure 6.7× 10^-12 Pa (RGA)
・1 ppm detection (CIS)
・Operating pressure 1.33 Pa (max., CIS)
・Dedicated software included (Windows version)
・Multi-head operation
・RS232 interface
■Applications
・Residual gas analysis of vacuum equipment
・Process management, leak check
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Product
Gas analyzer with outstanding cost performance (quadrupole mass spectrometer) Residual gas analyzer
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Handling Company
Tokyo Instruments, Inc
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Categories
1 Models of Gas analyzer with outstanding cost performance (quadrupole mass spectrometer) Residual gas analyzer
| Product Image | Part Number | Price (excluding tax) | Connection port | Detector | ECU dimensions (cm) | Electron emission current (mA) | Electron energy (V) | Filament | Focus voltage (V) | Ion energy (V) | Ionizer | Mass number measurement range | Mass resolution | Mass spectrometer | Minimum detection partial pressure | Operating pressure conditions | Power supply | Probe dimensions (cm) | Sensitivity (A/Torr) |
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Residual gas analyzer RGA100 |
Available upon quote | ICF70 | Faraday Cup (FC, standard) CEM, (RGA is optional) | 7.9 (W) ×10.4 (H) ×23.1 (D) (probe removable) | 0~3.5 (programmable) | 25~105 (programmable) |
RGA ThO2/Ir CIS ThO2/Ir or Tungsten |
0~150V (programmable) | 8 or 12V (programmable) |
Open ionization source closed ionization source |
100 amu | 0.5 amu or more | Quadrupole mass spectrometer |
6.7×10^-9 Pa (FC), 6.7×10^-12 Pa (CEM) 1.3×10^-8 Pa*1 (CIS mode), 1.3×10^-9 Pa*1 (RGA mode) |
0.013 Pa~UHV (FC) 1.3×10^-3 Pa~UHV (CEM) 1.3 Pa or less |
24 VDC@2.5 A Available from 100 VAC with addition of Op.2 | 22.2 (from flange surface to top of mesh) | 2×10^-4 (FC) , <200 (CEM) |
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About Company Handling This Product
- Japan