Thermal flow meter PI mass flow controller MODEL ST-500 series
KOFLOC Corp.
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Electronics & Electrical Use
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Energy Industry Use
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Chemical Industry Use
About This Product
■ST-500 SERIES
・PI...Pressure Insensitive Stable flow control is possible against pressure fluctuations.
・Metal seal MFC with diaphragm valve, compatible with corrosive fluids through EP treatment and oxide film treatment.
・DeviceNet®, EtherCAT® communication compatible
・Compatible with IGS W seal joints
・Highly accurate measurement control with S.P. accuracy, full flow control range response within 1 sec
・Multi-range function (30 to 110% F.S.) with dedicated app
■PI function
Conventional mass flow controllers have the problem of being sensitive to pressure fluctuations on the supply side, resulting in unstable control, such as instantaneous large flow disturbances. ST-500 is a mass flow controller equipped with a new PI function (PI...Pressure Insensitive) that solves this problem. A pressure sensor is installed in front of the flow sensor, and by comparing the detected pressure fluctuations with the pressure before the fluctuation and correcting the valve opening in real time, stable flow control can be performed against pressure fluctuations. It's possible. Suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment.
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Product
Thermal flow meter PI mass flow controller MODEL ST-500 series
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Handling Company
KOFLOC Corp.
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Categories
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Usage Scenarios
Electronics & Electrical Use / Energy Industry Use / Chemical Industry Use
0 Models of Thermal flow meter PI mass flow controller MODEL ST-500 series
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About Company Handling This Product
- Japan