Thermal flow meter Metal seal mass flow meter MODEL 5410 series
KOFLOC Corp.


About This Product

■MODEL 5410 SERIES ・Target fluid Gas N2, Air, H2, He, Ar, O2, CO2, etc. ・Maximum flow rate gas 10SCCM~20SLM ・Accuracy ±1%F.S. ・Metal seal

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    Thermal flow meter Metal seal mass flow meter MODEL 5410 series

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