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  4. Thermal flow meter Metal seal mass flow controller MODEL 5100 series (KOFLOC Corp.)

Thermal flow meter Metal seal mass flow controller MODEL 5100 series
KOFLOC Corp.

About This Product

■MODEL 5100 SERIES ・Target fluid Gas N2, Air, H2, He, Ar, O2, CO2, etc. ・Maximum flow rate gas 1SCCM~20SLM ・Accuracy ±1%F.S. ・Metal seal - Compatible with minute flow rates (from F.S.1SCCM in N2 conversion) ・Diaphragm seat valve reduces dead volume

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    Thermal flow meter Metal seal mass flow controller MODEL 5100 series

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KOFLOC Corp.

  • Japan

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