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Thermal flow meter Standard mass flow controller MODEL3660 series
KOFLOC Corp.

About This Product

■MODEL 3660 SERIES ・Target fluid Gas N2, Air, H2, He, Ar, O2, CO2, etc. ・Maximum flow rate gas 10SCCM~100SLM ・Accuracy ±1~1.5%F.S. ・Supports a wide flow range (from F.S.10SCCM to F.S.100SLM in N2 conversion)

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    Thermal flow meter Standard mass flow controller MODEL3660 series

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KOFLOC Corp.

  • Japan

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