Epiquest Co., Ltd.

For personal use. This is an MBE device for research that is low-cost, space-saving, and has high performance. Although it is a...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the stand...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the stand...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For production. The cell substrate equipment designed using advanced molecular beam simulation technology enables highly unifor...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

We perform etching processing using molten KOH on SiC wafers, GaN wafers, etc. safely and precisely. Just set the wafer in the ...

• Machining / Machine Tools

• Etching Equipment

■Features ・Achieves low gas emission characteristics. ・When heated to 1,500℃ without adding evaporation material, a vacuum le...

Multi-purpose annealing treatment is possible. A manual transfer rod allows samples to be moved in and out of the heating secti...

• Heat Sources

• Industrial Furnaces

By combining a vacuum-compatible quartz tube and a condensing lamp, it is possible to perform high-speed heating/cooling proces...

• Heat Sources

• Industrial Furnaces

■Features ・Achieves low gas emission characteristics. ・When heated to 1,500℃ without adding evaporation material, a vacuum le...

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

This product is the world's first K cell developed for Si, and allows for high-precision (0.005 to 0.5 Å/s) film thickness cont...

• Machining / Machine Tools

• Deposition Equipment

Built-in magnetic field deflection and beam axis adjustment functions using bellows. Piping mounting ports that enable differen...

By using a sputter gun compatible with high vacuum, it is possible to form thin films even at 10-2Pa levels. It is possible to ...

• Machining / Machine Tools

• Sputtering Equipment

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

This is an evaporation source that can supply two solid raw materials with one port. (Two shutter plates type)

Suitable when the evaporation source needs to be placed horizontally due to the configuration of the device.

We perform etching processing using molten KOH on SiC wafers, GaN wafers, etc. safely and precisely. Just set the wafer in the ...

• Machining / Machine Tools

• Etching Equipment

The measurement board can be set in a small chamber, and vacuum gas can be introduced and heated. Additionally, there is an obs...

• Machining / Machine Tools

• Heating Apparatus

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

This device is an all-in-one CVD device with a process unit, gas control, cylinder cabinet, and electrical control section inst...

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

■Features ・Compatible type that can be installed on MBE equipment manufactured by other companies. - Materials are selected wi...

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

This is a small vacuum evaporation device that compactly houses a turbo molecular pump, rotary pump, Pirani vacuum gauge, ioniz...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment