Epiquest Co., Ltd.

For personal use. This is an MBE device for research that is low-cost, space-saving, and has high performance. Although it is a...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the stand...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For production. The cell substrate equipment designed using advanced molecular beam simulation technology enables highly unifor...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the stand...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

By combining a vacuum-compatible quartz tube and a condensing lamp, it is possible to perform high-speed heating/cooling proces...

• Heat Sources

• Industrial Furnaces

Multi-purpose annealing treatment is possible. A manual transfer rod allows samples to be moved in and out of the heating secti...

• Heat Sources

• Industrial Furnaces

■Features ・Achieves low gas emission characteristics. ・When heated to 1,500℃ without adding evaporation material, a vacuum le...

We perform etching processing using molten KOH on SiC wafers, GaN wafers, etc. safely and precisely. Just set the wafer in the ...

• Machining / Machine Tools

• Etching Equipment

This product is the world's first K cell developed for Si, and allows for high-precision (0.005 to 0.5 Å/s) film thickness cont...

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

We perform etching processing using molten KOH on SiC wafers, GaN wafers, etc. safely and precisely. Just set the wafer in the ...

• Machining / Machine Tools

• Etching Equipment

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

Built-in magnetic field deflection and beam axis adjustment functions using bellows. Piping mounting ports that enable differen...

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

■Features ・Achieves low gas emission characteristics. ・When heated to 1,500℃ without adding evaporation material, a vacuum le...

• Machining / Machine Tools

• Deposition Equipment

• Machining / Machine Tools

• Deposition Equipment

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

The measurement board can be set in a small chamber, and vacuum gas can be introduced and heated. Additionally, there is an obs...

• Machining / Machine Tools

• Heating Apparatus

By using a sputter gun compatible with high vacuum, it is possible to form thin films even at 10-2Pa levels. It is possible to ...

• Machining / Machine Tools

• Sputtering Equipment

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

By using a sputter gun compatible with high vacuum, it is possible to form thin films even at 10-2Pa levels. It is possible to ...

• Machining / Machine Tools

• Sputtering Equipment

■Features ・Supports up to 6 inches ・High temperature growth possible (MAX2,200℃) ・Rapid temperature rise possible (1,000℃→2,...

• Machining / Machine Tools

• Vacuum Furnaces

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

This device is an all-in-one CVD device with a process unit, gas control, cylinder cabinet, and electrical control section inst...

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

This is a small vacuum evaporation device that compactly houses a turbo molecular pump, rotary pump, Pirani vacuum gauge, ioniz...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices