Epiquest Co., Ltd.

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

By using a sputter gun compatible with high vacuum, it is possible to form thin films even at 10-2Pa levels. It is possible to ...

• Machining / Machine Tools

• Sputtering Equipment

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

• Machining / Machine Tools

• Deposition Equipment

The SV series uses a vertical quartz reactor that has been optimally designed based on excellent simulation technology and many...

• Machining / Machine Tools

• Deposition Equipment

When the device mounting port is ICF114, a shutter mechanism can be added to an ICF70 size K cell without a shutter.

Suitable when the evaporation source needs to be placed horizontally due to the configuration of the device.

This is an evaporation source that can supply two solid raw materials with one port. (Two shutter plates type)

The SH series uses a horizontal stainless steel reactor specially developed for nitride semiconductors. It has excellent unifor...

• Machining / Machine Tools

• Deposition Equipment

■Features ・Compatible type that can be installed on MBE equipment manufactured by other companies. - Materials are selected wi...

Molecular beams are generated by evaporating and sublimating raw materials using a rapid heating and cooling method.

■Features ・Compatible type that can be installed on MBE equipment manufactured by other companies. - Materials are selected wi...

Suitable when you want to use a specially focused raw material beam.

■Features ・Compatible type that can be installed on MBE equipment manufactured by other companies. - Materials are selected wi...

Suitable when the evaporation source needs to be placed horizontally due to the configuration of the device.

This is a high temperature K cell that is ideal as an evaporation source for high melting point metals. Heating is possible up ...

The various gas raw materials introduced are evaporated and sublimated to generate molecular beams.

This is an evaporation source that can supply solid raw materials and gas raw materials with one port.

We use 3D thermofluid analysis (CFD) software to assist our customers with their experiments. We create a 3D analysis model fro...

We can design and manufacture custom-made high-temperature vacuum baking equipment for various uses.

This is a current confinement layer fabrication device, which is a key process for mass production of surface emitting lasers (...

This is a current confinement layer fabrication device, which is a key process for mass production of surface emitting lasers (...

A hatch for loading and unloading boards. Can be installed in a load lock room.