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Metal seal mass flow controller MODEL 5100 SERIES-Metal seal mass flow controller
Metal seal mass flow controller MODEL 5100 SERIES-KOFLOC Corp.

Metal seal mass flow controller MODEL 5100 SERIES
KOFLOC Corp.

About This Product

■Target fluid Gas: N₂, Air, H₂, He, Ar, O₂, CO₂, etc. ■Maximum flow rate Gas: 10SCCM~20SLM ■Accuracy ・±1%F.S. ・Metal seal - Compatible with minute flow rates (from F.S.1SCCM in N₂ conversion) ・Diaphragm seat valve reduces dead volume

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    Metal seal mass flow controller MODEL 5100 SERIES

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1 Models of Metal seal mass flow controller MODEL 5100 SERIES

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Metal seal mass flow controller MODEL 5100 SERIES-Part Number-Metal seal mass flow controller

Metal seal mass flow controller

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KOFLOC Corp.

  • Japan

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