Time-of-flight mass spectrometer TOF-MS/RGA
Japan Laser Co., Ltd.
About This Product
Spacetek Technology's IonTamer™ is a time-of-flight mass spectrometer/residual gas analyzer (TOF-RGA). Monitor gas composition in real time with high resolution and sensitivity. IonTamer™, the world's highest performance RGA, offers performance that was previously only available in laboratory equipment, making it compact, easy to handle, and embeddable.
Suitable for semiconductor manufacturing, OLED display manufacturing, optical components, solar panel manufacturing, vacuum coating processes (CVD, PVD, ALD), vacuum furnaces, metallurgy, research in ultra-high vacuum, and applications in harsh environments.
■Mass spectrometry
Mass spectrometers ionize atoms and molecules and measure their mass and number. This allows us to know what substances are present (identification) and how much of them are present (quantification).
■Time-of-flight mass spectrometer
Ions are separated by mass in an analysis chamber kept in vacuum. One method of mass separation is time-of-flight mass spectrometry (TOF-MS). In time-of-flight mass spectrometry, ions are accelerated with a certain amount of energy, flown through a vacuum, and their flight time is measured. Since the flight speed is proportional to the reciprocal of the square root of the ion's mass, the mass can be determined by measuring the time it takes to fly a certain distance.
Traditional time-of-flight mass spectrometers are large and cannot be made smaller without sacrificing performance. Therefore, inline and field applications could not take advantage of the superior performance. Spacetek Technology's technology is the first to commercialize a compact, high-performance time-of-flight mass spectrometer.
■Inline, online, 100% remote operation
The IonTamer™ device can be fully controlled and operated via the network. Intuitive software simplifies measurement data acquisition. Software development kits enable the integration of measurement data streams into process control applications for customers worldwide.
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Product
Time-of-flight mass spectrometer TOF-MS/RGA
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Handling Company
Japan Laser Co., Ltd.
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Categories
2 Models of Time-of-flight mass spectrometer TOF-MS/RGA
Items marked with have different values depending on the model number.
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| Product Image | Part Number | Price (excluding tax) |
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TOF-MS |
Available upon quote |
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TOF-RGA |
Available upon quote |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan