Cellback Co., Ltd.

PEGASUS provides high-quality deposition processes for the memory, power device, packaging, and MEMS markets.

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

PEGASUS HDP-CVD uses the high gas decomposition efficiency of ICP's high-density plasma to form low-temperature films and creat...

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

The SLRP-01, which has a unique ICP coil design, sends the electromagnetic waves necessary for gas decomposition into the decom...

• Machining / Machine Tools

• Plasma Cleaning Systems

PEGASUS Plat Form is a space-saving design and flexible architecture that allows integration of plasma CVD, RTA, Ashing, and Et...

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

We provide glass windows for etching equipment and CVD equipment with a transparent coating that is resistant to fluorine plasm...

• Inorganic & Mineral Materials

• Glass

PEGASUS 1500 is a large batch processing device that can accommodate G4.5 or φ6 inch (25 pieces) substrates. Single-wafer proce...

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

EGASUS RTA is a substrate rotation type annealing equipment compatible with φ300mmSi. The high-purity quartz tube infrared lamp...

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

Satera (room-temperature bonding equipment) combines unique plasma surface activation technology and high positional accuracy t...