Air Water Mechatronics Co., Ltd.

■Features ・This is a purification method that uses palladium alloy membrane permeation, which does not allow any substances ot...

• Generators

• Hydrogen Gas Generators

JAR type air purification equipment is a purification equipment mainly used for steppers, zero gas for automobile exhaust gas m...

• Generators

• Gas Generators

This device is a detoxification device primarily intended for exhaust gas treatment in the GaN manufacturing process. By effici...

• Purification Equipment

• Exhaust Gas Treatment Devices

Pioclean" chemically adsorbs various harmful components and completely removes them from exhaust gas. In addition, since it is ...

• Purification Equipment

• Exhaust Gas Treatment Devices

■Features ・High purity purification of gas is possible using our unique getter. ・Nitrogen (N2), which is difficult to remove ...

• Generators

• Gas Generators

■VPE series purification equipment The "VPE series gas purification equipment" was developed using the world's best gas purific...

• Generators

• Gas Generators

■Features ・Small capacitance diaphragm gauge ・Self-temperature regulating type is the smallest class ・High precision and sta...

• Meters & Instruments

• Vacuum Gauges

■Features ・The combination of a simple flow design and a Pyocrine cartridge that boasts extremely high throughput allows for e...

• Purification Equipment

• Exhaust Gas Treatment Devices

This device can completely decompose PFCs such as CF4, C2F6, and C5F8, as well as SF6 and HFCs. Additionally, the heater heatin...

• Purification Equipment

• Exhaust Gas Treatment Devices

This is a safety device that, in the unlikely event of a blowout from a toxic gas cylinder or leakage of toxic gas from semicon...

• Purification Equipment

• Exhaust Gas Treatment Devices

This equipment processes exhaust gases such as hydrogen compounds such as SiH4 and fluorine compounds such as C2F6 and SF6 emit...

• Purification Equipment

• Exhaust Gas Treatment Devices

■Summary The SEC series is a high-performance mass flow controller made entirely in Japan that was developed by bringing togeth...

• Controllers

• Mass Flow Controllers

■Features ・Generation of gas with stable concentration ・Support for various gas types -Using the multi-gas and multi-gas rang...

■Features ・Decomposes NF3 to below allowable concentration (10 ppm) ・The gas at the exit of the abatement device does not con...

• Purification Equipment

• Exhaust Gas Treatment Devices

■Summary The SEC series is a high-performance mass flow controller made entirely in Japan that was developed by bringing togeth...

• Controllers

• Mass Flow Controllers

■Features ・Ideal for exhaust gas treatment in high- and ferro-inductive electric material manufacturing processes ・Highly eff...

• Purification Equipment

• Exhaust Gas Treatment Devices

■Features ・Excellent performance in refining gases for various semiconductors by using a uniquely developed catalyst ・Achieve...

This device is a wet type abatement device for etching processes. It is possible to remove target gases such as Cl2, HBr, BCl3,...

• Purification Equipment

• Exhaust Gas Treatment Devices