SCREEN Febax Co., Ltd.

Realizes three high-performance “Minimal” ■“Minimal” contamination It has a non-contact structure with no parts such as bearing...

9 models listed

• Pumps

• Micropumps

A compact slit-type coating device that flexibly accommodates all coating conditions and materials and achieves highly accurate...

2 models listed

• Machining / Machine Tools

• Coating Process Equipment

A multi-functional, high-performance slit-type coating device that can handle various coating materials from nano-level thin fi...

• Machining / Machine Tools

• Coating Process Equipment

We are deploying WET equipment including developing machines from SCREEN Finetech, which has the world's No. 1 market share in ...

4 models listed

• Semiconductor Manufacturing

• Semiconductor Manufacturing Equipment Component & Part Machining

■Features ・A device that uniformly dries the coating material, moisture, etc. on the top of the base material by applying heat...

• Heat Sources

• Heaters

Cleaning device Removes bacteria generated in the washing tank in a short time. We have introduced many systems for cleaning be...

• Cleaning Agents & Equipment

• Cleaning Systems

A small vacuum drying device that accelerates drying by reducing the pressure on the substrate after applying the chemical solu...

• Dryers

• Vacuum Dryers