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  4. Measuring equipment nanoprober (Physics Technology Co., Ltd.)
Measuring equipment nanoprober-Nanoprober
Measuring equipment nanoprober-Physics Technology Co., Ltd.

Measuring equipment nanoprober
Physics Technology Co., Ltd.

About This Product

SmarAct's nanoprober SMARPROBE-LX was developed to achieve high efficiency and stability in closed-loop probing with nanometer resolution. Up to 8 probes can be placed and samples fixed on the sample stage can be analyzed. Application examples include SEM for failure analysis of 5nm transistors and optical microscopes for atmospheric probing of large samples. ■Features ・Closed loop control with 1nm resolution ・Active position hold ・Wide movement range and low thermal drift ・Probing over 30x30mm area ・High-speed EBAC/EBIC imaging ・All-in-one user interface ・Automatic approach and alignment of all probes ・Point-and-click navigation on SEM images

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    Measuring equipment nanoprober

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1 Models of Measuring equipment nanoprober

Product Image Part Number Price (excluding tax)
Measuring equipment nanoprober-Part Number-Nanoprober

Nanoprober

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Physics Technology Co., Ltd.

  • Japan

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