White interferometer ZeGage™ Pro
Ametek Co., Ltd. ZYGO Division
About This Product
■White interferometer that can be used at production sites
ZeGage™ Pro and ZeGage™ Pro HR white light interferometers provide micro- and nanoscale non-contact surface measurements and characterization of a wide variety of surface types to ensure quality and process control on the manufacturing floor. Our industry-leading ZeGage Pro series ensures the performance, ease of use, flexibility and accuracy of a benchtop class industrial white interferometer.
Built on ZYGO's proprietary CSI technology, ZeGage Pro offers innovative technology that enables accurate, reliable, and simple surface measurements. Its unique features include SureScan™ technology for vibration resistance measurements, Part Finder, and Smart Setup to ease part setup and optimize measurements.
Measuring a variety of surfaces and parts quickly and easily has never been simpler.
■Strong performance
- Proprietary non-contact measurement technology enhanced with SureScan™ technology makes it less susceptible to vibration and can be installed anywhere in your facility.
-Quantitative surface measurements with nanometer-level precision provide better gauging capabilities.
- 1.9 million pixel high-resolution image sensor provides advanced surface data visualization and visualization with high-speed surface measurement in just seconds.
- Fully automated measurement sequences and field stitching enable high-resolution measurements over wide areas. (Requires optional motorized stage)
■Versatility
Measure various surface textures and parameters, including 2D and 3D profiles such as surface texture, shape, and step height.
- Included MX software provides comprehensive tools for surface data visualization, analysis, and reporting.
Expand your measurement range with accessories such as objective turrets, manual and motorized sample stages, and optional software modules for film topography profiling and 2D analysis using Cognex's VisionPro®.
-
Product
White interferometer ZeGage™ Pro
-
Handling Company
Ametek Co., Ltd. ZYGO Division
-
Categories
2 Models of White interferometer ZeGage™ Pro
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Minimum sampling interval | Optical horizontal resolution | RMS reproducibility | STR | Step accuracy | Step reproducibility | Vertical scan range |
|---|---|---|---|---|---|---|---|---|---|
|
|
ZeGage™ Pro |
Available upon quote | 0.17um (when using 50x objective lens) | 0.52um (when using 50x objective lens) | 0.1nm | 3.5nm | 3% | 0.30% | 20mm |
|
|
ZeGageProHR |
Available upon quote | 0.17um (when using 50x objective lens) | 0.52um (when using 50x objective lens) | 0.1nm | 0.15nm | 3% | 0.30% | 20mm |
Click on the part number for more information about each product
Customers who viewed this product also viewed
Other products of Ametek Co., Ltd. ZYGO Division
View more products of Ametek Co., Ltd. ZYGO Division
