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  4. XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M (Japan Laser Co., Ltd.)
XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M-9066-COM-E-M
XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M-Japan Laser Co., Ltd.

XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M
Japan Laser Co., Ltd.

About This Product

■Piezoelectric element motor base/linear stage with nanometer resolution ・Integrated/modular type ・Open loop/closed loop with encoder ・Picomotor: Retains set position even when power is turned off ・Mixed configuration of manual axis and electric axis possible ・Nanopositioning less than 30nm We offer a variety of nanometer resolution precision stages using Picomotors or piezo motors.

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    XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M

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1 Models of XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M

Product Image Part Number Price (excluding tax) Amount of movement Bearing Drive shaft Minimum travel amount Motor
XYZ Stage Nanopositioning Linear Stage Piezo Driven Linear Stage 9066-COM-E-M-Part Number-9066-COM-E-M

9066-COM-E-M

Available upon quote 12.7mm
25.4mm 		Cross roller X 80nm Closedloop-Picomotor

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Japan Laser Co., Ltd.

  • Japan

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XYZ Vacuum Stages
XYZ Vacuum Stages　Japan Laser Co., Ltd.
Japan Laser Co., Ltd.

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