UV light source 193nm single frequency Q-switched LD excitation laser IXION-193-SLM
Japan Laser Co., Ltd.
About This Product
■High quality TEM00 beam, spectral width <120MHz, Fourier-limited single frequency all-solid-state laser
The IXION-193 is a single-frequency, all-solid-state laser system that can be used for optical metrology, correction of 193nm stepper optics, and bandwidth control of high-power ArF excimer lasers. The spectral bandwidth is an approximation of the theoretical Fourier limit.
The center wavelength can be specified from 185 to 194 nm when ordering. As an option, the system can be equipped with a high-precision spectrometer with an absolute wavelength accuracy of 0.001 nm. This allows you to control the laser's spectral tuning with the highest precision.
■Application example
・193nm weighing/measurement
・Spectrometer correction
·interference
・Excimer laser seed light source
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Product
UV light source 193nm single frequency Q-switched LD excitation laser IXION-193-SLM
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Handling Company
Japan Laser Co., Ltd.
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Categories
1 Models of UV light source 193nm single frequency Q-switched LD excitation laser IXION-193-SLM
| Product Image | Part Number | Price (excluding tax) | Average output power | Beam quality | Coherence length | Pulse energy | Pulse width (typ) | Pulse-to-pulse stability | Repetition frequency | Spectral width | Wavelength | Wavelength tunability |
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IXION-193 SLM |
Available upon quote | >10mW | M2 < 1.6 | >2m | 1.6μJ | 8-12ns | Σ < 2.5% | 1 – 15kHz | <80MHz | 193.368nm | >10pm |
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About Company Handling This Product
- Japan