Non-contact thickness measuring device VarioMetric
Japan Laser Co., Ltd.
About This Product
■Thickness measuring device using laser interference
・For thick film (1~500μm) measurement
・Very small spot size
・Small, high speed, high precision
In the semiconductor industry, there is currently an increasing need for backgrinding technology. This is due to demands from wafer thinning for advanced packaging such as SiP and flip chips, and etching processes used for FIB circuit modification and failure analysis of these advanced packaging devices. As the number of backgrinding processes increases, the need for film thickness measurement for grinding and polishing control is also increasing.
Contact-type thickness measuring instruments are used for this measurement, but they are insufficient in terms of accuracy and efficiency. Additionally, there are non-contact spectroscopic interference measuring instruments, but although these are effective for measuring thin films, they are not suitable for measuring relatively thick objects such as those handled in the backgrinding process.
VarioMetric is a thickness measuring machine developed to meet these demands, and is good at measuring relatively thick objects. Since it uses a laser-based interference method, it has high light utilization efficiency and can measure highly doped Si wafers and wafers with surface roughness with high accuracy.
■Application example
Semiconductors (Si, GaAs, InP, SiC…), glass, sapphire, plastic, etc.
・Wafer thickness management during backgrinding process
・Thickness management in the grinding and polishing process during the physical and chemical analysis phase of failure analysis, especially end point detection of FIB processing in Flip-Chip packages
・MEMS manufacturing process
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Product
Non-contact thickness measuring device VarioMetric
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Handling Company
Japan Laser Co., Ltd.
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Categories
1 Models of Non-contact thickness measuring device VarioMetric
| Product Image | Part Number | Price (excluding tax) | Measurement time | Measuring film thickness range | Resolution | Spot size |
|---|---|---|---|---|---|---|
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VarioMetric |
Available upon quote | 1 second or less | 1μm~1mm | 0.01μm | 10μm |
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About Company Handling This Product
- Japan