Scanning probe microscope (SPM) 8 inch (200mm) wafer compatible AFM-IR device Vista 200 PiFM / PiF-IR
Japan Laser Co., Ltd.
About This Product
This model is compatible with large samples, allowing you to perform AFM-IR measurements by placing an 8-inch (200mm) wafer directly on the sample stage. It can handle not only 8-inch wafers but also 152 mm photomask samples. In addition to high spatial resolution chemical imaging, nanoscale IR spectroscopy also supports nano-contaminant analysis. It also supports IR libraries.
■Specifications for semiconductors
With a 200mm x 200mm sample stage, the Vista 200 is ideal for analyzing wafers and photomasks. The Vista200 can be configured with either a magnetic vacuum chuck or a dedicated EUV mask holder. This equipment is ideal for 4-inch, 6-inch, and 8-inch wafers.
■Strong yet non-destructive measurement
MolecularVista's AFM-IR PiFM is capable of true non-contact mode measurements. Since there is no contact with the sample, it stays clean and the tip stays clean as well.
■Process rationalization
Included data analysis software allows teams to quickly go from measurement to presentation-ready results. Through close cooperation with data acquisition software, it is possible to obtain the necessary analysis results in real time. The scripting API allows for custom recipes, and the files are open, making it easy to integrate with third-party software.
■Excellent AFM performance
With a 120µm xy scanner, 12µm sample z scanner, and integrated vibration isolation, AFM performance is top-class. High bandwidth dual z feedback system enables true non-contact AFM for IR PiFM.
■Developed and built for industry
Maximize efficiency and minimize measurement interference.
The 300 mm wide sample access door minimizes thermal disturbances that cause drift and maximizes productivity. The forward-moving stage and easy-to-use head mount allow for easy tip and sample exchange without opening the entire housing.
■Self-contained system
No special environment is required. The Vista200 comes complete with vibration-isolated construction, a temperature-controlled acoustic enclosure with 0.1°C accuracy, and a completely sealed beam path with dry air.
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Product
Scanning probe microscope (SPM) 8 inch (200mm) wafer compatible AFM-IR device Vista 200 PiFM / PiF-IR
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Handling Company
Japan Laser Co., Ltd.
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Categories
1 Models of Scanning probe microscope (SPM) 8 inch (200mm) wafer compatible AFM-IR device Vista 200 PiFM / PiF-IR
| Product Image | Part Number | Price (excluding tax) | Depth probe (IR) | Dual Z feedback | Imaging mode | PiF laser options | Sample stage movement area | Scan size | Spectral mode |
|---|---|---|---|---|---|---|---|---|---|
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Vista200 |
Available upon quote | 20 nm in surface mode and >100 nm in bulk mode | 12μm z-scanner with 600nm high-speed scanner scans both high bandwidth and wide z-axis range | Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping | QCL (770–1,840, 1,995–2,395cm−1), OPO/DFG (590–2,050, 2,250–4,400, 5,000–7,000cm−1) | 200mm x 200mm square | 120μm x 120μm | PiFm-IR, FvD |
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About Company Handling This Product
- Japan