High-speed laser defect scanner AT series for substrates
Japan Laser Co., Ltd.
About This Product
Lumina Instruments' AT Series is an optical inspection system that performs full-surface defect detection, mapping, classification, and review of transparent, translucent, and opaque substrates. Utilizing four simultaneously operating detection channels and Lumina's proprietary detection technology, it enhances yield control and process management for semiconductor substrates and high-tech glass substrates. Although it is a laser scanning method, it is extremely fast and can mount substrates of various sizes, shapes, and thicknesses.
■High-speed defect imaging system AT series features
・Laser scanning type (non-rotating type)
・Can inspect rectangular, thin, warped, and specially shaped boards
・Subnanometer scale membrane defects
・Detection and classification of defects
・Compatible with transparent and opaque substrates
・Maximum sample size 300mm x 300mm
■Function
・Defect Map: Color-coded display according to defect type
・Pareto Chart: Defect type and total number
・Defect Summary: Binning and grouping of defects based on defect size and film thickness
・Report: Report defect type, location, length, size, etc. (CSV format)
・Zoom: Display and review the specified defect as an image
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Product
High-speed laser defect scanner AT series for substrates
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Handling Company
Japan Laser Co., Ltd.
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Categories
2 Models of High-speed laser defect scanner AT series for substrates
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Automatic machine model | Maximum board size | Mounting board thickness | PSL particle sensitivity | Scan speed 150mm/200mm/300mm |
|---|---|---|---|---|---|---|---|
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AT1 |
Available upon quote |
AT1-AUTO Open cassette method 200mm wafer |
300x300mm | 0.1-5mm |
100nm (on silicon) 150nm (on glass) |
225s/440s/970s |
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AT2 |
Available upon quote |
AT2-EFEM EFEM method 300mm wafer |
450x450mm | 0.1-5mm |
200nm (on silicon) 300nm (on glass) |
60s/75s/150s |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan